메뉴 건너뛰기




Volumn 18, Issue 3, 2006, Pages 210-215

Femtosecond laser bulk micromachining of microfluid channels in poly(methylmethacrylate)

Author keywords

Bulk machining; Femtosecond laser micromachining; Microfluidic channels; Polymer

Indexed keywords

FEMTOSECOND LASER BULK MICROMACHINING; MICROFLUIDIC CHANNELS; PULSED LASER ENERGY; TRANSPARENT MATERIALS;

EID: 33845668729     PISSN: 1042346X     EISSN: None     Source Type: Journal    
DOI: 10.2351/1.2227015     Document Type: Article
Times cited : (41)

References (18)
  • 1
    • 0028766486 scopus 로고
    • Laser-Induced break-down by impact ionization in Si02 with pulse widths from 7 ns to 150 fs
    • D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, "Laser-Induced break-down by impact ionization in Si02 with pulse widths from 7 ns to 150 fs," Appl. Phys. Lett. 64, 3071-3073 (1994).
    • (1994) Appl. Phys. Lett. , vol.64 , pp. 3071-3073
    • Du, D.1    Liu, X.2    Korn, G.3    Squier, J.4    Mourou, G.5
  • 2
    • 0001597046 scopus 로고    scopus 로고
    • Writing waveguides in glass with a femtosecond laser
    • K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, "Writing waveguides in glass with a femtosecond laser," Opt. Lett. 21, 1729-1731 (1996).
    • (1996) Opt. Lett. , vol.21 , pp. 1729-1731
    • Davis, K.M.1    Miura, K.2    Sugimoto, N.3    Hirao, K.4
  • 3
    • 0031560329 scopus 로고    scopus 로고
    • Photowritten optical waveguides in various glasses with ultrashort pulse laser
    • K. Miura, J. R. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, "Photowritten optical waveguides in various glasses with ultrashort pulse laser," Appl. Phys. Lett. 71, 3329-3331 (1997).
    • (1997) Appl. Phys. Lett. , vol.71 , pp. 3329-3331
    • Miura, K.1    Qiu, J.R.2    Inouye, H.3    Mitsuyu, T.4    Hirao, K.5
  • 4
    • 37049186161 scopus 로고
    • 3-dimensional optical storage memory
    • R. A. Parthenopoulos and P. M. Rentzepis, "3-dimensional optical storage memory," Science 245, 843-845 (1989).
    • (1989) Science , vol.245 , pp. 843-845
    • Parthenopoulos, R.A.1    Rentzepis, P.M.2
  • 5
    • 0002498305 scopus 로고    scopus 로고
    • Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy
    • C. B. Schaffer, A. Brodeur, J. F. Garcia, and E. Mazur, "Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy" Opt. Lett. 26, 93-95 (2001).
    • (2001) Opt. Lett. , vol.26 , pp. 93-95
    • Schaffer, C.B.1    Brodeur, A.2    Garcia, J.F.3    Mazur, E.4
  • 6
    • 2942731788 scopus 로고    scopus 로고
    • Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching
    • Y. Bellouard, A. Said, M. Dugan, and P. Bado, "Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching," Opt. Express 12, 2120-2129 (2004).
    • (2004) Opt. Express , vol.12 , pp. 2120-2129
    • Bellouard, Y.1    Said, A.2    Dugan, M.3    Bado, P.4
  • 7
    • 3042600829 scopus 로고    scopus 로고
    • Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass
    • D. Hwang, T. Choi, and C. Grigoropoulos, "Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass," Appl. Phys. A: Mater. Sci. Process. 79, 605-612 (2004).
    • (2004) Appl. Phys. A: Mater. Sci. Process. , vol.79 , pp. 605-612
    • Hwang, D.1    Choi, T.2    Grigoropoulos, C.3
  • 8
    • 0034501192 scopus 로고    scopus 로고
    • Machining of transparent materials using an IR and UV nanosecond pulsed laser
    • A. Salleo, T. Sands, and F. Y. Genin, "Machining of transparent materials using an IR and UV nanosecond pulsed laser," Appl. Phys. A: Mater. Sci. Process. 71, 601-608 (2000).
    • (2000) Appl. Phys. A: Mater. Sci. Process. , vol.71 , pp. 601-608
    • Salleo, A.1    Sands, T.2    Genin, F.Y.3
  • 9
    • 17444371723 scopus 로고    scopus 로고
    • Simultaneous multimicrohole drilling of soda-lime glass by water-assisted ablation with femtosecond laser pulses
    • R. An, Y. Li., Y. P. Dou, H. Yang, and Q. H. Gong, "Simultaneous multimicrohole drilling of soda-lime glass by water-assisted ablation with femtosecond laser pulses," Opt. Express 13, 1855-1859 (2005).
    • (2005) Opt. Express , vol.13 , pp. 1855-1859
    • An, R.1    Li, Y.2    Dou, Y.P.3    Yang, H.4    Gong, Q.H.5
  • 10
    • 23744509822 scopus 로고    scopus 로고
    • Rapidly prototyped three-dimensional nanofluidic channel networks in glass substrates
    • K. Ke, E. F. Hasselbrink, Jr., and A. J. Hunt, "Rapidly prototyped three-dimensional nanofluidic channel networks in glass substrates," Anal. Chem. 77, 5083-5088 (2005).
    • (2005) Anal. Chem. , vol.77 , pp. 5083-5088
    • Ke, K.1    Hasselbrink Jr., E.F.2    Hunt, A.J.3
  • 14
    • 2142834693 scopus 로고    scopus 로고
    • Femtosecond laser micro-structuring and refractive index modification applied to laser and photonic devices
    • M. Richardson, A. Zoubir, C. Rivero, C. Lopez, L. Petit, and L. Richardson, "Femtosecond laser micro-structuring and refractive index modification applied to laser and photonic devices," Proc. SPIE 5347, 18-27 (2003).
    • (2003) Proc. SPIE , vol.5347 , pp. 18-27
    • Richardson, M.1    Zoubir, A.2    Rivero, C.3    Lopez, C.4    Petit, L.5    Richardson, L.6
  • 15
    • 33645157137 scopus 로고    scopus 로고
    • Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy
    • C. Schaffer, A. Brodeur, and E. Mazur, "Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy," Opt. Lett. 22, 187 (2001).
    • (2001) Opt. Lett. , vol.22 , pp. 187
    • Schaffer, C.1    Brodeur, A.2    Mazur, E.3
  • 16
    • 0037329823 scopus 로고    scopus 로고
    • Chemical and spectroscopic aspects of polymer ablation: Special features and novel directions
    • Washington, D.C.
    • T. Lippert and J. T. Dickinson, "Chemical and spectroscopic aspects of polymer ablation: Special features and novel directions," Chem. Rev. (Washington, D.C.) 103, 453-485 (2003).
    • (2003) Chem. Rev. , vol.103 , pp. 453-485
    • Lippert, T.1    Dickinson, J.T.2
  • 18
    • 2542444296 scopus 로고    scopus 로고
    • Deep reactive ion etching of commercial PMMA in O2/CHF3, O2/Ar based discharges
    • C. Zhang, C. Yang, and D. Ding, "Deep reactive ion etching of commercial PMMA in O2/CHF3, O2/Ar based discharges," J. Micromech. Microeng. 14, 663-666 (2004).
    • (2004) J. Micromech. Microeng. , vol.14 , pp. 663-666
    • Zhang, C.1    Yang, C.2    Ding, D.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.