Calibration of multi-axis MEMS force sensors using the shape from motion method

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 2006, Issue , 2006, Pages 269-274

  Sun, Yu ^a   Kim, Keekyoung ^a   Voyles, Richard M ^b   Nelson, Bradley J ^c  

^a UNIVERSITY OF TORONTO   (Canada)

^b UNIVERSITY OF MINNESOTA   (United States)

^c ETH ZURICH   (Switzerland)

Author keywords

Calibration; MEMS force sensor; Multi axis; Shape from motion

Indexed keywords

CALIBRATION; COMPUTER SIMULATION; OPTIMIZATION; SENSORS;

FORCE VECTORS; MEMS FORCE SENSOR; MULTI-AXIS; SHAPE FROM MOTION;

MICROELECTROMECHANICAL DEVICES;

EID: 33845601353     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.2006.1641723     Document Type: Conference Paper

References (22)

1. Y. Sun, B.J. Nelson, D.P. Potasek, and E. Enikov, "A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drives," Journal of Micromechanics and Microengineering, Vol. 12, pp. 832-840, 2002.
2. Y. Sun, K.T. Wan, B.J. Nelson, J. Bischof, and K. Roberts, "Mechanical property characterization of the mouse zona pellucida," IEEE Trans. on NanoBioScience, Vol. 2, pp. 279-286, 2003.
3. Y. Sun, S.N. Fry, D.P. Potassek, D.J. Bell, and B.J. Nelson, "Characterizing fruit fly flight behaviour using a microforce sensor with a new comb drive configuration," J. of Microelectromechanical Systems, Vol. 14, pp. 4-11, 2005.
4. G. Lin, K. S. Pister, and K.P. Roos, "Surface micromachined polysilicon heart cell force transducer," J. of Microelectromechanical Systems, Vol. 9, pp. 9-17, 2000.
5. G.G. Guilbault and J.H. Luong, "Biosensors: current status and future possibilities," Selective Electrode Review, Vol. 11, pp. 3-16, 1989.
6. M.E. Fauver, D.L. Dunaway, D.H. Lillenfeld, H.G. Craighead, and G.H. Pollack, "Microfabricated cantilevers for measurement of subcellular and molecular forces," IEEE Trans. on Biomedical Engineering, Vol. 45, pp. 891-898, 1998.
7. W.H. Wright, G.J. Sonek, Y. Tadir, and M.W. Berns, "Laser trapping in cell biology," IEEE J. of Quantum Electronics, Vol. 26, pp. 2148-2157, 1990.
8. J. Conia, B.S. Edwards, and S. Voelkel, "The micro-robotic laboratory: optical trapping and scissing for the biologist," J. of Clinical Laboratory Analysis, Vol. 11, pp. 28-38, 1997.
9. A. Kishino and T. Yanagada, "Force measurements by micromanipulation of a single actin filament by glass needles," Nature, Vol. 334, pp. 74-76, 1988.
10. A. Ishijima, H. Kojima, H. Higuchi, Y. Harada, T. Funatsu, and T. Yanagida, "Multipleand single-molecule analysis of the actomyosin motor by nanometer piconewton manipulation with a microneedle: unitary steps and forces," Biophysical J., Vol. 70, pp. 383-400, 1996.
11. M. Tokunaga, T. Aoki, M. Hiroshima, K. Kitamura, and T. Yanagida, "Subpiconewton intermolecular force microscopy," Biochem. Biophys. Res. Commun., Vol. 231, pp. 566-569, 1997.
12. U. Dammer, O. Popescu, P. Wagner, D. Anselmetti, H.J. Guntherodt, and G.N. Misevic, "Binding strength between cell adhesion proteoglycans measured by atomic force microscopy," Science, Vol. 267, pp. 1173-1175, 1995.
13. A.F. Oberhauser, P.E. Marszalek, H.P. Erickson, and J.M. Fernandez, "The molecular elasticity of the extracellular matrix protein tenascin," Nature, Vol. 393, pp. 181-185, 1998.
14. G.T. Charras, P.P. Lehenkari, and M.A. Horton, "Atomic force microscopy can be used to mechanically stimulate osteoblasts and evaluate cellular strain distribution," Ultramicroscopy, Vol. 86, pp. 85-95, 2001.
15. F.J. Alenghat, B. Fabry, K.Y. Tsai, W.H. Goldmann, and D.E. Ingber, "Analysis of cell mechanics in single vinculin-deficient cells using a magnetic tweezer," Biochem. Res. Commun., Vol. 277, pp. 93-99, 2000.
16. V. Heinrich and R.E. Waugh, "A picoNewton force transducer and its application to measurement of the bending stiffness of phospholipids membranes," Ann. Biomed. Eng., Vol. 24, pp. 595-605, 1996.
17. J.N. Fass and D.J. Odde, "Tensile force dependent neurite elicitation via anti-βl integrin antibody-coated magnetic beads," Biophysical J., Vol. 85, pp. 623-636, 2003.
18. E. Evans, "Looking inside molecular bonds at biological interfaces with dynamic force spectroscopy," Biophys. Chem.,Vol. 82, pp. 83-97. 1999.
19. R.M. Hochmuth, "Micropipette aspiration of living cells," J. of Biomechanics, Vol. 33, pp. 15-22, 2000.
20. C. Tomasi and T. Kanade, "Shape and motion from image streams: a factorization method," Technical Report CMU-CS-91-172, Carnegie Mellon University, Pittsburgh, PA, 1991.
21. R.M. Voyles, J.D. Morrow, and P.K. Khosla, "The shape from motion approach to rapid and precise force/torque sensor calibration," J. of Dynamic Systems, Measurement and Control, Vol. 119, No. 2, pp. 229-235, 1997.
22. D. Piyabongkarn, Y. Sun, R. Rajamani, A. Sezen, and B.J. Nelson, "Travel range extension of MEMS electrostatic microactuators," IEEE Trans. on Control Systems Technology, Vol. 13, No. 1, pp. 138-145, 2005.