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Volumn 133, Issue 1, 2007, Pages 243-249

Implementation of phase-locked loop control for MEMS scanning mirror using DSP

Author keywords

Optical MEMS; Phase locked loop; Scanning mirror

Indexed keywords

DIGITAL SIGNAL PROCESSING; MICROELECTROMECHANICAL DEVICES; MIRRORS; NATURAL FREQUENCIES; SCANNING; VARIABLE FREQUENCY OSCILLATORS;

EID: 33845593978     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.03.026     Document Type: Article
Times cited : (22)

References (13)
  • 1
    • 33845573357 scopus 로고    scopus 로고
    • M. Wu, "The Development of Optical MEMS Fabrication-the Case of Micro Scanning Mirror Driven by Electrostatic Comb-driven Actuator." Ph.D. thesis, Power Mechanical Engineering, National Tsing Hua University, 2005.
  • 2
    • 0037983685 scopus 로고    scopus 로고
    • A reinforced micro-torsional-mirror driven by electrostatic torque generators
    • Lin H.-Y., and Fang W. A reinforced micro-torsional-mirror driven by electrostatic torque generators. Sens. Actuators A 105 (2003) 1-9
    • (2003) Sens. Actuators A , vol.105 , pp. 1-9
    • Lin, H.-Y.1    Fang, W.2
  • 3
    • 0035709920 scopus 로고    scopus 로고
    • Adaptive Tuning for Vibration Gyroscopes
    • Orlando, FL
    • Leland R.P. Adaptive Tuning for Vibration Gyroscopes. IEEE Conference on Decision and Control. Orlando, FL (2001) 3447-3452
    • (2001) IEEE Conference on Decision and Control , pp. 3447-3452
    • Leland, R.P.1
  • 4
    • 10844242099 scopus 로고    scopus 로고
    • Stability and resolution analysis of a phase-locked loop nature frequency tracking system for MEMS fatigue testing
    • Sun X., Horowitz R., and Komvopoulos K. Stability and resolution analysis of a phase-locked loop nature frequency tracking system for MEMS fatigue testing. J. Dynamic Syst., Measure. Ctrl. 124 (2002) 559-605
    • (2002) J. Dynamic Syst., Measure. Ctrl. , vol.124 , pp. 559-605
    • Sun, X.1    Horowitz, R.2    Komvopoulos, K.3
  • 5
    • 0037445346 scopus 로고    scopus 로고
    • Phase-locked control of the Coriolis meter's resonance frequency based on virtual instrumentation
    • Kutin J., Smercnik A., and Bajsic I. Phase-locked control of the Coriolis meter's resonance frequency based on virtual instrumentation. Sens. Actuators A 104 (2003) 86-93
    • (2003) Sens. Actuators A , vol.104 , pp. 86-93
    • Kutin, J.1    Smercnik, A.2    Bajsic, I.3
  • 7
    • 0037387777 scopus 로고    scopus 로고
    • Characterization of selective polysilicon deposition for MEMS resonator tuning
    • Joachim D., and Lin L. Characterization of selective polysilicon deposition for MEMS resonator tuning. J. Microelectromech. Syst. 12 (2003) 193-200
    • (2003) J. Microelectromech. Syst. , vol.12 , pp. 193-200
    • Joachim, D.1    Lin, L.2
  • 8
    • 0002617483 scopus 로고    scopus 로고
    • A triangular electrostatic comb array for micromechanical resonant frequency tuning
    • Lee K.B., and Cho Y.-H. A triangular electrostatic comb array for micromechanical resonant frequency tuning. Sens. Actuators A 70 (1998) 112-117
    • (1998) Sens. Actuators A , vol.70 , pp. 112-117
    • Lee, K.B.1    Cho, Y.-H.2
  • 9
    • 17444404902 scopus 로고    scopus 로고
    • Nonlinear mechanical effects in silicon longitudinal mode beam resonators
    • Kaajakari V., Mattila T., Lipsanen A., and Oja A. Nonlinear mechanical effects in silicon longitudinal mode beam resonators. Sens. Actuators A 120 (2005) 64-70
    • (2005) Sens. Actuators A , vol.120 , pp. 64-70
    • Kaajakari, V.1    Mattila, T.2    Lipsanen, A.3    Oja, A.4
  • 12
    • 17444428654 scopus 로고    scopus 로고
    • A novel self-aligned vertical electrostatic comb-drives actuator for scanning micromirrors
    • Tsou C., Lin W.T., Fan C.C., and Chou B.C.S. A novel self-aligned vertical electrostatic comb-drives actuator for scanning micromirrors. J. Micromech. Microeng. 12 (2005) 860-885
    • (2005) J. Micromech. Microeng. , vol.12 , pp. 860-885
    • Tsou, C.1    Lin, W.T.2    Fan, C.C.3    Chou, B.C.S.4
  • 13
    • 15544376517 scopus 로고    scopus 로고
    • Integration of the DRIE, MUMPs, and bulk micromachining for superior micro-optical systems
    • Wu M., Lai C.-F., and Fang W. Integration of the DRIE, MUMPs, and bulk micromachining for superior micro-optical systems. J. Micromech. Microeng. 15 (2005) 535-542
    • (2005) J. Micromech. Microeng. , vol.15 , pp. 535-542
    • Wu, M.1    Lai, C.-F.2    Fang, W.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.