A rib-reinforced micro torsional mirror driven by electrostatic torque generators

Sensors and Actuators, A: Physical

Volumn 105, Issue 1, 2003, Pages 1-9

  Lin, Hung Yi ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Lever mechanism; Micro torsional mirror; Rib reinforced structure

Indexed keywords

ELECTRIC POTENTIAL; ELECTROCHEMICAL ELECTRODES; MICROMACHINING; THIN FILMS; TORQUE; TORSIONAL STRESS;

LIVER MECHANISM;

ELECTROSTATIC ACTUATORS;

EID: 0037983685     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00056-6     Document Type: Article

References (12)

1. K.E. Peterson, Silicon torsional scanning mirror, IBM J. Res. Dev. 24 (5) (1980) 631-637.
2. L.J. Hornbeck, Current Status of The Digital Micromirror Device (DMD) for Projection Television Applications, Int. Electron Devices Tech. Dig., Dallas, TX, December 1993, pp. 381-384.
3. M.-H. Kiang, O. Solgaard, R.S. Muller, K.Y. Lau, Surface-Micromachined Electrostatic-Comb Driven Scanning Micromirrors for Barcode Scanners, IEEE MEMS Workshop, San Diego, CA, February 1996, pp. 192-197.
4. M.-H. Kiang, O. Solgaard, R.S. Muller, K.Y. Lau, Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning, J. Microelectromech. Sys. 7 (1) (1998) 27-37.
5. P.M. Hagelin, O. Solgaard, Optical raster-scanning displays based on surface-micromachined polysilicon mirrors, IEEE Sel. Topics Quantum Electr. 5 (1) (1999) 67-74.
6. K.S.J. Pister, M.W. Judy, S.R. Burgett, R.S. Fearing, Microfabricated hinges, Sens. Actuators A 33 (1992) 249-256.
7. R.A. Conant, P.M. Hagelin, O. Solgaard, K.Y. Lau, R.S. Muller, A Raster-Scanning Full-Motion Video Display Using Polysilicon Micromachined Mirrors, Transducers 1999, Sendai, Japan, June 1999, pp. 376-379.
8. H.-Y. Lin, W. Fang, Out-of -plane comb-drive lever actuator, ASME IMECE 2000, Orlando, FL, November 2000, pp. 97-103.
9. H.-Y. Lin, W. Fang, Rib-reinforced micromachined beam and it applications, J. Micromech. Microeng. 10 (2000) 93-99.
10. J.T. Nee, R.A. Conant, M.R. Hart, R.S. Muller, K.Y. Lau, Stretched-film micromirrors for improved optical flatness, in: Proceedings of the IEEE MEMS'2000, Miyazaki, Japan, January 2000, pp. 704-709.
11. H.-Y. Lin, W. Fang, The improvement of the micro torsional mirror by a reinforced folded frame, ASME IMECE 2000, Orlando, FL, November 2000, pp. 189-194.
12. C.G. Keller, R.T. Howe, Nickel-filled Hexsil thermally actuated tweezers, Transducers 1995, Stockholm, Sweden, June 1995, pp. 376-379.