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Volumn 1, Issue , 2005, Pages 7-12

Through wafer copper via for silicon based SiP application

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; ELECTRIC POWER SYSTEM INTERCONNECTION; ELECTRONICS PACKAGING; MICROPROCESSOR CHIPS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

EID: 33845582687     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (8)

References (12)
  • 1
    • 0028744345 scopus 로고    scopus 로고
    • th IEEE/CPMT Electronics Manufacturing Technology Symposium, La Joila, CA, 1, pp.387-393, 1994
    • th IEEE/CPMT Electronics Manufacturing Technology Symposium, La Joila, CA, Vol 1, pp.387-393, 1994
  • 2
    • 0034482702 scopus 로고    scopus 로고
    • Yasuki Fukui et al, Tripe-Chip Stacked CSP, in Proc. ECTC, 2000, pp. 385-389
    • Yasuki Fukui et al, "Tripe-Chip Stacked CSP", in Proc. ECTC, 2000, pp. 385-389
  • 3
    • 33847300111 scopus 로고    scopus 로고
    • 3D System in Package using Stacked Silicon Platform technology
    • August
    • Kripesh et al, "3D System in Package using Stacked Silicon Platform technology", IEEE Transactions on Advanced Packaging, August, 2005.
    • (2005) IEEE Transactions on Advanced Packaging
    • Kripesh1
  • 4
    • 33847258371 scopus 로고    scopus 로고
    • V. Kripesh, V P Ganesh, Seung Wook Yoon, Rajnish Kumar Sharma, S. Mohanraj, Mahadeven Iyer, EPIC 2003 Three Dimensional Stacked modules using Silicon Carter
    • V. Kripesh, V P Ganesh, Seung Wook Yoon, Rajnish Kumar Sharma, S. Mohanraj, Mahadeven Iyer, EPIC 2003 "Three Dimensional Stacked modules using Silicon Carter"
  • 5
    • 33847245475 scopus 로고    scopus 로고
    • http://www.semiconductors.philips.com/news/content/file_1044.html
  • 6
    • 33847275220 scopus 로고    scopus 로고
    • http://www.semiconductors.philips.com/markets/communications/nexperia/ system/
  • 7
    • 19644392005 scopus 로고    scopus 로고
    • P. Philippe and A. Oruk, A Highly Miniaturized 2.4 GHz Bluetooth™ Radio Utilizing an Advanced System-in-Package Technology, European Microwave Week, Amsterdam, Oct. 11-12, 2004.
    • P. Philippe and A. Oruk, "A Highly Miniaturized 2.4 GHz Bluetooth™ Radio Utilizing an Advanced System-in-Package Technology", European Microwave Week, Amsterdam, Oct. 11-12, 2004.
  • 9
    • 27944504314 scopus 로고    scopus 로고
    • P. Deixler, T. Letavic, T. Madhadejkul, Y. Bouttement, R. Brock, P.C. Tan, V. Saikumar, A. Rodriguez, R. Colclaser, P. Kellowan, H. Sun, N. Bell, A. Yao, R. van Langevelde, T. Vanhoucke, W.D. van Noort, G.A.M. Hurkx, D. Crespo, C. Biard, S. Bardy and J.W. Slotboom, A cost-effective Power-on-Board BiCMOS Manufacturing Technology with Elite Passive Enhancements Optimized for 'Silicon-based RF System-in-Package Environment, 2005 IEEE Bipolar / BiCMOS Circuits and Technology Meeting (BCTM 2005), Santa Barbara (USA), Oct. 10-11, 2005.
    • P. Deixler, T. Letavic, T. Madhadejkul, Y. Bouttement, R. Brock, P.C. Tan, V. Saikumar, A. Rodriguez, R. Colclaser, P. Kellowan, H. Sun, N. Bell, A. Yao, R. van Langevelde, T. Vanhoucke, W.D. van Noort, G.A.M. Hurkx, D. Crespo, C. Biard, S. Bardy and J.W. Slotboom, "A cost-effective Power-on-Board BiCMOS Manufacturing Technology with Elite Passive Enhancements Optimized for 'Silicon-based RF System-in-Package Environment", 2005 IEEE Bipolar / BiCMOS Circuits and Technology Meeting (BCTM 2005), Santa Barbara (USA), Oct. 10-11, 2005.
  • 10
    • 33847251153 scopus 로고    scopus 로고
    • C S Premachandran, Ranganathan N., S. Mohanraj, Chong Ser Choong, Mahadevan K Iyer A vertical wafer level packaging through hole filled via interconnect by lift-off polymer method for MEMS and 3D stacking Application, 2005 Electronic Components and Technology Conference
    • C S Premachandran, Ranganathan N., S. Mohanraj, Chong Ser Choong, Mahadevan K Iyer "A vertical wafer level packaging through hole filled via interconnect by lift-off" polymer method for MEMS and 3D stacking Application", 2005 Electronic Components and Technology Conference
  • 11
    • 0036646379 scopus 로고    scopus 로고
    • NT Nguyen, E Boellaard, NP Pham, VG Kutchoukov, G Craciun, PM Sarro Through-wafer copper electroplating for three-dimensional interconnects - Journal of Micromechanics and Microengineering, 2002 - iop.org
    • NT Nguyen, E Boellaard, NP Pham, VG Kutchoukov, G Craciun, PM Sarro "Through-wafer copper electroplating for three-dimensional interconnects " - Journal of Micromechanics and Microengineering, 2002 - iop.org


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.