Formation of alkylsiloxane self-assembled monolayers on Si3N4

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 2, 1999, Pages 540-544

  Sung, Myung M ^a,b   Kluth, G Jonathan ^a   Maboudian, Roya ^a  

^a University of California   (United States)

^b Korea Research Institute of Chemical Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033419645     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581616     Document Type: Article

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