Flexible circuit-based RF MEMS switches

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 3, Issue , 2001, Pages 757-762

  Wang, Chunjun ^a   Ramadoss, Ramesh ^a   Lee, Simone ^a   Gupta, K C ^a   Bright, Victor M ^a   Lee, Y C ^a  

^a UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLEXIBLE PRINTED CIRCUITS (FPC); LASER MACHINING;

CAPACITANCE; CLADDING (COATING); ETCHING; INTEGRATED CIRCUIT MANUFACTURE; LAMINATING; LASER APPLICATIONS; MICROMACHINING; PHOTOLITHOGRAPHY; POLYIMIDES; PRINTED CIRCUIT BOARDS; ROLLING; SEMICONDUCTING FILMS; SEMICONDUCTOR SWITCHES; SURFACE MEASUREMENT; VOLTAGE MEASUREMENT; WAVEGUIDES;

MICROELECTROMECHANICAL DEVICES;

EID: 1542747775     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. K. E. Petersen, "Micromechanical membrane switches on silicon, " IBM J. Res. Develop., vol. 23, no. 4, pp. 376-385, July 1979.
2. Z. Jamie Yao, Shea Chen, Susan Eshelman, David Denniston, and Chuck Goldsmith, "Micromachined Low-loss Microwave Switches," IEEE J. Microelectrmec. Syst., vol. 8, no. 2, pp. 129-134, Jun. 1999.
3. Daniel Hyman et al., "Surface-Micromachined RF MEMS switches on GaAs substrates," Int. J. RF and Microwave CAE, vol. 9/no. 4, pp. 348-361, July 1999.
4. J. B. Muldavin, and G. M. Rebeiz, "High-Isolation CPW MEMS shunt switches - Part 1: Modeling," IEEE Trans. Microwave Theory Tech., vol. 48, no. 6, pp. 1045-1052, June 2000.
5. th North American Manufacturing Research Conference, Gainesville, FL. May 2001.
6. CoventorWare ver. 2001.1, Coventor Inc., USA, 2001.