Study on effects of substrate temperature on growth and structure of alignment carbon nanotubes in plasma-enhanced hot filament chemical vapor deposition system

Applied Surface Science

Volumn 253, Issue 2, 2006, Pages 904-908

  Dang, Chun ^a   Wang, Tingzhi ^b  

^a HUAIYIN INSTITUTE OF TECHNOLOGY   (China)

^b JIANGNAN UNIVERSITY   (China)

Author keywords

Alignment carbon nanotubes; Chemical vapor deposition; Substrate temperature

Indexed keywords

METHANE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY;

ALIGNMENT CARBON NANOTUBES; GROWTH RATE; SUBSTRATE TEMPERATURE;

CARBON NANOTUBES;

EID: 33845518839     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.01.025     Document Type: Article

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