Effects of viscous flow on residual stresses in film/substrate systems

Journal of Applied Physics

Volumn 91, Issue 5, 2002, Pages 2760-2765

  Hsueh, Chun Hway ^a   Lee, Sanboh ^b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33845433499     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1445282     Document Type: Article

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