The viscosity of germanium during substrate relaxation upon thermal anneal

Journal of Materials Research

Volumn 12, Issue 7, 1997, Pages 1706-1710

  Rosenberg, Sara E ^a   Madras, Cynthia G ^a   Wong, Peter Y ^a   Miaoulis, Ioannis N ^a  

^a Tufts University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELASTICITY; HETEROJUNCTIONS; NUMERICAL ANALYSIS; POLYCRYSTALLINE MATERIALS; RELAXATION PROCESSES; SEMICONDUCTING SILICON; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; VISCOSITY;

SOLID PHASE VISCOSITY;

GERMANIUM;

EID: 0031190633     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1997.0235     Document Type: Article

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