Dispersion-free optical coherence depth sensing with a spatial frequency comb generated by an angular spectrum modulator

Optics Express

Volumn 14, Issue 25, 2006, Pages 12109-12121

  Duan, Zhihui ^a   Miyamoto, Yoko ^a   Takeda, Mitsuo ^a  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT MODULATION; LIGHT MODULATORS; OPTICAL PROPERTIES; OPTICAL SENSORS;

FREQUENCY COMB TECHNIQUE; MONOCHROMATIC PLANE WAVES; SPATIAL LIGHT MODULATOR (SLM);

COHERENT LIGHT;

EID: 33845389034     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.14.012109     Document Type: Article

References (27)

1. K. Hotate and T. Okugawa, "Selective extraction of a two-dimensional optical image by synthesis of the coherence function," Opt. Lett. 17, 1529-1531 (1992).
2. K. Hotate and O. Kamatani, "Optical coherence domain reflectometry by synthesis of coherence function," J. Lightwave Technol. 11, 1701-1709 (1993).
3. S.-J. Lee, B. Widiyatmoko, M. Kourogi, and M. Ohtsu, "Ultrahigh scanning speed optical coherence tomography using optical frequency comb generators," Jpn. J. Appl. Phys. Part II, 40, L878-L880 (2001).
4. K. Hotate and T. Okugawa, "Optical information processing by synthesis of the coherence function," J. Lightwave Technol. 12, 1247-1255 (1994).
5. Z. He and K. Hotate, "Synthesized optical coherence tomography for imaging of scattering objects by use of a stepwise frequency-modulated tunable laser diode," Opt. Lett. 24, 1502-1504 (1999).
6. S. Choi, M. Yamamoto, D. Moteki, T. Shioda, Y. Tanaka, and T. Kurokawa, "Frequency-comb-based interferometer for profilometry and tomography," Opt. Lett. 31, 1976-1978 (2006).
7. P. A. Flournoy, R. W. McClure, and G. Wyntjes, "White-light interferometric thickness gauge," Appl. Opt., 11, 1907-1915 (1972).
8. N. Tanaka, M. Takeda, and K. Matsumoto, "Interferometrically measuring the physical properties of test object," United States Patent 4,072,422 (filed October 20 1976, 1978).
9. M. Davidson, K. Kaufman, I. Mazor, and F. Cohen, "An application of interference microscopy to integrated circuit inspection and metrology," in Integrated Circuit Metrology, Inspection, and Process Control, K. M. Monahan, ed., Proc. SPIE 775, 233-247 (1987).
10. B. S. Lee and T. C. Strand, "Profilometry with a coherence scanning microscope," Appl. Opt. 29, 3784-3788 (1990).
11. T. Dresel, G. Hausler, and H. Venzke, "Three-dimensional sensing of rough surfaces by coherence radar," Appl. Opt. 31, 919-925 (1992).
12. D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, "Optical coherence tomography," Science 254, 1178-1181 (1991).
13. J. Schwider and L. Zhou, "Dispersive interferometric profilometer," Opt. Lett. 19, 995-997 (1994).
14. M. Takeda, and H. Yamamoto, "Fourier-transform speckle profilometry: Three-dimensional shape measurements of diffuse objects with large height steps and /or spatially isolated surfaces," Appl. Opt. 33, 7829-7837 (1994).
15. S. Kuwamura and I. Yamaguchi, "Wavelength scanning profilometry for real-time surface shape measurement," Appl. Opt. 36, 4473-4482 (1997).
16. H. J. Tiziani, B. Franze, and P. Haible, "Wavelength-shift speckle interferometry for absolute profilometry using mode-hope free external cavity diode laser," J. Mod. Opt. 44, 1485-1496 (1997).
17. M. Kinoshita, M. Takeda, H. Yago, Y. Watanabe, and T. Kurokawa, "Optical frequency-domain microprofilometry with a frequency-tunable liquid-crystal Fabry-Perot etalon device," Appl. Opt. 38, 7063-7068 (1999).
18. D. S. Mehta, M. Sugai, H. Hinosugi, S. Saito, M. Takeda, T. Kurokawa, H. Takahashi, M. Ando, M. Shishido, and T. Yoshizawa, "Simultaneous three-dimensional step-height measurement and high-resolution tomographic imaging with a spectral interferometric microscope," Appl. Opt. 41, 3874-3885 (2002).
19. M. Takeda, "The philosophy of fringes: Analogies and dualities in fringe generation and analysis," in Fringe '97 Automatic Processing of Fringe Patterns, W. Jueptner and W. Osten, eds., Akademie Verlag Series in Optical Metrology, (Akademie Verlag, Berlin, 1997), pp. 17-26.
20. M. Takeda, "Space-time analogy in absolute optical profilometry using frequency-scan techniques: A tutorial review," in Perspectives in Engineering Optics, K. Singh and P. K. Rastogi, eds, (Anita Publications, New Delhi, 2003), pp. 192-198.
21. J. Ch. Vienot, R. Fernere, J. P. Goedgebur, "Conjugation of space and time variables in optics," in Optics in Four Dimensions, M. A. Machado and L. M. Narducci, eds., No. 65 of AIP Conference Proceedings, (American Institute of Physics, New York, 1981), pp.49-62.
22. Z. Duan, Y. Miyamoto, and M. Takeda, "Dispersion-free absolute interferometry based on angular spectrum scanning," Opt. Express 14, 655-663 (2006).
23. P. D. Ruiz and J. M. Huntley, "Depth-resolved displacement measurement using tilt scanning speckle interferometry," in Fringe 2005 Automatic Processing of Fringe Patterns, W. Osten, ed. (Springer, Berlin, 2005), pp. 238-241.
24. C. W. McCutchen, "Generalized source and the van Cittert-Zernike theorem: A study of spatial coherence required for interferometry," J. Opt. Soc. Am. 56, 727-733 (1966).
25. M. Kuechel, "Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometry," US Patent 6804011 B2, (2004) or US Patent Application 2003/0030819 A1, (2003).
26. J. Rosen and M. Takeda, "Longitudinal spatial coherence applied for surface profilometry," Appl. Opt. 37, 4107-4111 (2000).
27. M. Gokhler and J. Rosen, "Synthesis of a multiple-peak spatial degree of coherence for imaging through absorbing media," Appl. Opt. 44, 2921-2927 (2005).