Longitudinal spatial coherence applied for surface profilometry

Applied Optics

Volumn 39, Issue 23, 2000, Pages 4107-4111

  Rosen, Joseph ^a   Takeda, Mitsuo ^b  

^a BEN GURION UNIVERSITY OF THE NEGEV   (Israel)

^b Department of Information and Communication Engineering ^*  (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRY; LIGHT SOURCES; MIRRORS; SURFACE ROUGHNESS;

OPTICAL COHERENCE PROFILOMETRY;

PROFILOMETRY;

EID: 0041681415     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.004107     Document Type: Article

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