Hybrid LCVD of micro-metallic lines for TFT-LCD circuit repair

Applied Surface Science

Volumn 253, Issue 2, 2006, Pages 1029-1035

  Park, J B ^a   Kim, C J ^b   Shin, P E ^b   Park, S H ^b   Kang, H S ^b   Jeong, S H ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b LG Electronics Inc   (South Korea)

Author keywords

Circuit repair; Laser application; LCD; LCVD; Micropatterning

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY; INTEGRATED CIRCUITS; LASER APPLICATIONS; LIQUID CRYSTAL DISPLAYS; THIN FILM TRANSISTORS;

CIRCUIT REPAIR; GLASS SUBSTRATE; MICROPATTERNING; PYROLYTIC MECHANISMS;

METALLIC COMPOUNDS;

EID: 33845386766     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.06.054     Document Type: Article

References (21)

1. Bäuerle D. Laser Processing and Chemistry. 2nd ed. (1996), Springer, Germany
2. Han S.I., and Jeong S.H. J. Laser Appl. 16 (2004) 154
3. Baum T.H., and Comita P.B. Thin Solid Films 218 (1992) 80
4. Williams K., Maxwell J., Larsson K., and Boman M. Proceedings of the 20th IEEE International Conference (1999) 232
5. Bjorklund K.L., and Boman M. Appl. Phys. A 75 (2002) 493
6. Leppävuori S., Remes J., and Moilanen H. Appl. Surf. Sci. 138 (1999) 123
7. Flynn D.K., Steinfeld J.I., and Sethi D.S. J. Appl. Phys. 59 (1986) 3914
8. Black J.G., Doran S.P., Rothschild M., and Ehrlich D.J. Appl. Phys. Lett. 56 (1990) 1072
9. López E., Chiussi S., Serra J., González P., Serra C., Kosch U., León B., Fabbri F., Fornarini L., and Martelli S. Appl. Surf. Sci. 234 (2004) 422
10. López E., Chiussi S., Kosch U., González P., Serra J., Serra C., and León B. Appl. Surf. Sci. 248 (2005) 113
11. Allen S.D., and Tringubo A.B. J. Appl. Phys. 54 (1983) 1641
12. Nambu Y., Morishige Y., and Kishida S. Appl. Phys. Lett. 56 (1990) 2581
13. Auvert G. Appl. Surf. Sci. 86 (1995) 466
14. Michel M., Izquierdo R., Tabbal M., Evoy S., Desjardins P., Bernier M., Bertomeu J., Elyaagoubi N., Suys M., Sacher E., and Yelon A. Mater. Sci. Eng. B 45 (1997) 200
15. Kordás K., Remes J., Leppävuori S., and Nánai L. Appl. Surf. Sci. 178 (2001) 93
16. Tóth Z., and Piglmayer K. Appl. Surf. Sci. 186 (2002) 184
17. Gilgen H.H., Cacouris T., Shaw P.S., Krchnavek R.R., and Osgood R.M. Appl. Phys. B 42 (1987) 55
18. Gluck N.S., Wolga G.J., Bartosch C.E., Ho W., and Ying Z. J. Appl. Phys. 61 (1987) 998
19. Mulenko S.A., Izvekov A.V., Petrov Y.N., Mygashko V.P., and Ovechko V.S. Appl. Surf. Sci. 248 (2005) 475
20. Lai K.K., and Lamb H.H. Thin Solid Films 370 (2000) 114
21. Weber M.J. Handbook of Optical Materials (2003), CRC Press, USA