Monolithic vertical integration of Metal-Oxide-Semiconductor transistor with subterranean photonics in silicon

2006 Optical Fiber Communication Conference, and the 2006 National Fiber Optic Engineers Conference

Volumn 2006, Issue , 2006, Pages

  Indukuri, Tejaswi ^a   Koonath, Prakash ^a   Jalali, Bahrain ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED OPTOELECTRONICS; MONOLITHIC INTEGRATED CIRCUITS; OPTICAL RESONATORS; PHOTONS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

MICRODISK RESONATORS; MONOLITHIC VERTICAL INTEGRATION; SILICON ON INSULATOR WAFER; SUBTERRANEAN PHOTONICS;

MOSFET DEVICES;

EID: 33845370837     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ofc.2006.215480     Document Type: Conference Paper

References (11)

1. A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, M. Pannicia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor", Nature 427, 615 (2004).
2. M. Borselli, T. J. Johnson, and O. Painter, "Beyond the Rayleigh scattering limit in high-Q silicon microdisks: Theory and experiment", Opt. Express 13, 1515, (2005).
3. H. Chen, D. T. K. Tong, "Two-dimensional symmetric multimode interferences in silicon square waveguides", IEEE Phot. Tech. Lett. 17, 801 (2005).
4. C. A. Barrios, V. R. Alameida, R. Panepucci, M. Lipson, "All-optical control of light on a silicon chip", J. Lightwave Tech. 21, 2332 (2003)
5. O. Boyraz, B. Jalali, "Demonstration of a silicon Raman laser", Opt. Exp. 12, 5269 (2004).
6. L. Khriachtchev, M. Rasanen, S. Novikov, "Efficient wavelength-selective optical waveguiding in a silica layer containing Si nanocrystals", Appl. Phy. Lett. 83, 3018 (2003).
7. P. Koonath, T. Indukuri, B. Jalali, "Vertically-coupled micro-resonators realized using three-dimensional sculpting in silicon", Appl. Phys. Lett. 85, 1018 (2004).
8. P. Koonath, T. Indukuri, B. Jalali, "Add-drop filters utilizing vertically coupled microdisk resonators in silicon", Appl. Phys. Lett. 86, 091102 (2005).
9. T. Indukuri, P. Koonath, B. Jalali, "Subterranean silicon photonics: Demonstration of buried waveguide-coupled microresonators", Appl. Phys. Lett. 87, 081114 (2005).
10. J. W.Sleight, C. Lin, G. J. Grula, "Stress induced defects and transistor leakage for shallow trench isolated SOI", IEEE Electron Device Letters, 20, 248, (1999).
11. O. W. Holland, D. Fathy, and D. K. Sadana, "Formation of ultrathin, buried oxides in Si by O+ ion implantation", Appl. Phys. Lett. 69, 674 (1996).