Subterranean silicon photonics: Demonstration of buried waveguide-coupled microresonators

Applied Physics Letters

Volumn 87, Issue 8, 2005, Pages

  Indukuri, Tejaswi ^a   Koonath, Prakash ^a   Jalali, Bahram ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PHOTONICS; THREE-DIMENSIONAL MONOLITHIC INTEGRATION; WAVEGUIDE-COUPLED MICRORESONATORS; WAVEGUIDING STRUCTURES;

FABRICATION; MASKS; OPTICAL WAVEGUIDES; OXYGEN; SILICON;

OPTICAL RESONATORS;

EID: 24344489867     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2009062     Document Type: Article

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