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Applied Physics Letters

Volumn 85, Issue 6, 2004, Pages 1018-1020

Vertically-coupled micro-resonators realized using three-dimensional sculpting in silicon

(3) Koonath, Prakash a Indukuri, Tejaswi a Jalali, Bahram a

a UNIVERSITY OF CALIFORNIA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIED SPONTANEOUS EMISSION (ASE); MICRODISK RESONATORS; MONOLITHIC FABRICATION PROCESS; OPTICAL MICROCAVITIES;

CRYSTAL STRUCTURE; ION IMPLANTATION; OPTICAL DEVICES; PHOTOLITHOGRAPHY; POLARIZATION; RAMAN SCATTERING; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SPECTRUM ANALYZERS; THERMAL EFFECTS; WAVEGUIDES;

OPTICAL RESONATORS;

EID: 4344675311 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1781370 Document Type: Article

Times cited : (35)

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