Nano particles' behavior in non-Newtonian slurry in mechanical process of CMP

Tribology Letters

Volumn 24, Issue 3, 2006, Pages 179-186

  Haosheng, Chen ^a   Jiang, L ^b   Darong, C ^a   Jiadao, W ^a  

^a TSINGHUA UNIVERSITY   (China)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

Chemical mechanical polishing; Multiphase flow; Nano particle; Non Newtonian fluid

Indexed keywords

FRACTURE; MATHEMATICAL MODELS; MULTIPHASE FLOW; NON NEWTONIAN FLOW; PARTICLE SIZE ANALYSIS; PRESSURE EFFECTS; SLURRIES; VELOCITY MEASUREMENT; VISCOSITY; VISCOSITY MEASUREMENT;

HYDRODYNAMIC PRESSURE; NANO PARTICLE; NON-NEWTONIAN FLUID; NON-NEWTONIAN SLURRY;

CHEMICAL MECHANICAL POLISHING;

CHEMICAL MECHANICAL POLISHING; FRACTURE; MATHEMATICAL MODELS; MULTIPHASE FLOW; NON NEWTONIAN FLOW; PARTICLE SIZE ANALYSIS; PRESSURE EFFECTS; SLURRIES; VELOCITY MEASUREMENT; VISCOSITY; VISCOSITY MEASUREMENT;

EID: 33751528764     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-006-9133-5     Document Type: Article

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