Materials' properties measurements: Choosing the optimal scanning probe microscope configuration

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 1308-1312

  Burnham, N A ^a   Gremaud, G ^a   Kulik, A J ^a   Gallo, P J ^a   Oulevey, F ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5544251185     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589086     Document Type: Article

References (12)

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