A novel PDMS valveless micropump with a circular lightweight piezo-composite actuator

Key Engineering Materials

Volumn 326-328 I, Issue , 2006, Pages 245-248

  Nguyen, Thanh Tung ^a   Goo, Nam Seo ^a  

^a Konkuk University   (South Korea)

Author keywords

LIPCA; PDMS; Piezoelectric actuator; Valveless micropump

Indexed keywords

DEFORMATION; DIAPHRAGMS; MICROACTUATORS; NUMERICAL METHODS; POLYMERIC MEMBRANES;

LIGHTWEIGHT PIEZOCOMPOSITE ACTUATOR (LIPCA); PIEZOELECTRIC ACTUATORS; POLYDIMETHYLSILOXANE (PDMS); VALVELESS MICROPUMPS;

PIEZOELECTRIC DEVICES;

EID: 33751518587     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-415-4.245     Document Type: Conference Paper

References (10)

1. P. Woias, Sensors and Actuators B Vol. 105 (2005), p. 28.
2. N.T. Nguyen, X.Y. Huang, K.C. Toh, ASME Trans. J. Fluids Eng. 124 (2002), p. 384.
3. D.J. Laser and J.G. Santiago, Journal of Micromech. Microeng. Vol. 14 (2004), R35-R64.
4. J.H. Kim, C.J. Kang and Y.S. Kim, Journal of Microelectronic Engineering 71 (2004), p. 119.
5. A. Olsson, Valve-less Diffuser Miropumps, Ph.D. Thesis of the Royal Institute of Technology, Stockholm, Sweden (1998).
6. S. Li and S. Chen, Sensors and Actuators A Vol. 104 (2003), p. 151.
7. C.J. Morris and F.K. Forster, J. Micromech. Microeng. Vol. 10 (2000), p. 459.
8. K.J. Yoon, S. Shin, H.C. Park and N.S. Goo, J. of Smart Mater. Struct. Vol. 11 (2002), p. 163.
9. J.C. Lotters et al., J. Micromech. Microeng. Vol. 7 (1997), p. 145.
10. N.T. Nguyen and X. Huang, Sensors and Actuators A Vol. 88 (2001), p. 104.