Oxidation of III-V semiconductors

Corrosion Science

Volumn 49, Issue 1, 2007, Pages 31-41

  Graham, M J ^a   Moisa, S ^a   Sproule, G I ^a   Wu, X ^a   Landheer, D ^a   SpringThorpe, A J ^a   Barrios, P ^a   Kleber, S ^b   Schmuki, P ^b  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

A. Electronic materials; B. AES, XPS, TEM; C. Oxidation films

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COMPOSITION; OXIDATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRONIC MATERIALS; OXIDATION FILMS;

SEMICONDUCTING FILMS;

AUGER ELECTRON SPECTROSCOPY; COMPOSITION; OXIDATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 33751334825     PISSN: 0010938X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.corsci.2006.05.004     Document Type: Article

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