|
Volumn 34, Issue 1, 2002, Pages 481-484
|
Composition and growth of anodic and thermal oxides on InP and GaAs
|
Author keywords
AES; Anodic oxides; GaAs; InP; SIMS; Thermal oxides; XPS
|
Indexed keywords
COMPOSITION EFFECTS;
CURRENT DENSITY;
ELECTRIC PROPERTIES;
ELECTRIC VARIABLES MEASUREMENT;
ELECTROLYTES;
ELECTRON TRAPS;
GROWTH (MATERIALS);
OXIDES;
SECONDARY ION MASS SPECTROMETRY;
SEMICONDUCTING GALLIUM ARSENIDE;
SEMICONDUCTING INDIUM PHOSPHIDE;
ANODIC FILMS;
METAL INSULATOR SEMICONDUCTOR STRUCTURES;
THERMAL OXIDES;
SURFACE STRUCTURE;
|
EID: 0036693083
PISSN: 01422421
EISSN: None
Source Type: Journal
DOI: 10.1002/sia.1343 Document Type: Conference Paper |
Times cited : (21)
|
References (14)
|