Influence of Deuterium and Platinum on the Thermal Oxidation of GaAs

Journal of the Electrochemical Society

Volumn 150, Issue 10, 2003, Pages

  Hultquist, G ^a   Sproule, G I ^b   Moisa, S ^b   Graham, M J ^b   Sodervall U ^c  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^c CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DEUTERIUM; OXIDATION; PLATINUM; TRANSPORT PROPERTIES;

THERMAL OXIDATION;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0142116357     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1603252     Document Type: Article

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