Thermal oxidation of III-V materials and heterostructures

Journal of the Electrochemical Society

Volumn 149, Issue 10, 2002, Pages

  Hussey, R J ^a   Driad, R ^a   Sproule, G I ^a   Moisa, S ^a   Fraser, J W ^a   Wasilewski, Z R ^a   McCaffrey, J P ^a   Landheer, D ^a   Graham, Mike J ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; DOPING (ADDITIVES); ELECTRON MICROSCOPY; HETEROJUNCTIONS; OPTIMIZATION; OXIDATION; REACTION KINETICS; SEMICONDUCTING ALUMINUM COMPOUNDS;

THERMAL OXIDE FILMS;

MOSFET DEVICES;

EID: 0036804165     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1506935     Document Type: Article

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