Low loss inductors built-on PECVD intrinsic amorphous silicon for RF integrated circuits

Canadian Conference on Electrical and Computer Engineering

Volumn 2005, Issue , 2005, Pages 340-343

  Chang, Stella ^a   Sivoththaman, Siva ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

PECVD i a Si:H; Planar inductors

Indexed keywords

ISOLATION MATERIALS; PECVD I-A-SI:H; PLANAR INDUCTORS;

AMORPHOUS SILICON; INTEGRATED CIRCUITS; LOW TEMPERATURE EFFECTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS; STOICHIOMETRY;

ELECTRIC INDUCTORS;

EID: 33751311604     PISSN: 08407789     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/CCECE.2005.1556941     Document Type: Conference Paper

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