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Volumn , Issue , 2002, Pages 1027-1031
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On the ultimate limits of IC inductors - An RF MEMS perspective
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITANCE;
CIRCUIT RESONANCE;
CMOS INTEGRATED CIRCUITS;
EDDY CURRENTS;
ELECTRIC CONDUCTIVITY;
ELECTRIC IMPEDANCE;
ELECTRIC LOSSES;
ELECTRIC POTENTIAL;
MAGNETOELECTRIC EFFECTS;
MICROELECTROMECHANICAL DEVICES;
NATURAL FREQUENCIES;
OPTIMIZATION;
PASSIVATION;
SEMICONDUCTING SILICON;
SEMICONDUCTOR JUNCTIONS;
TUNING;
SELF-RESONANCE FREQUENCIES;
ELECTRIC INDUCTORS;
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EID: 0036293023
PISSN: 05695503
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (18)
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References (22)
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