TiN/SiNx submicronic multilayer coatings obtained by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD)

Surface and Coatings Technology

Volumn 201, Issue 7 SPEC. ISS., 2006, Pages 4021-4025

  Perez Mariano, J ^a   Caro, J ^b   Colominas, C ^a  

^a INSTITUT QUÍMIC DE SARRIÀ   (Spain)

^b FUNDACIÓ CTM CENTRE TECNOLÒGIC   (Spain)

Author keywords

Chemical vapor deposition; FBR CVD; Fluidized bed; Multilayer coating

Indexed keywords

ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; FLUIDIZED BEDS; INDENTATION; SCANNING ELECTRON MICROSCOPY; SILICON NITRIDE; STAINLESS STEEL; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

FLUIDIZED BED REACTOR; MULTILAYER COATINGS; NANOINDENTATION;

MULTILAYERS;

ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; FLUIDIZED BEDS; INDENTATION; MULTILAYERS; SCANNING ELECTRON MICROSCOPY; SILICON NITRIDE; STAINLESS STEEL; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

EID: 33751256285     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.08.032     Document Type: Article

References (21)

1. Veprek S., and Reiprich S. Thin Solid Films 268 (1995) 64
2. Bull S.J. Thin Solid Films 398-399 (2001) 291
3. Malik H.I., Mgaloblishvili R., and Mills B. J. Mater. Sci. 19 (2000) 1779
4. Leoni M., Scardi P., Rossi S., Fedrizzi L., and Massiani Y. Thin Solid Films 345 (1999) 263
5. Larsson M., Bromark M., Hedenqvist P., and Hogmark S. Surf. Coat. Technol. 76 (1995) 202
6. Bromark M., Larsson M., Hedenqvist P., and Hogmark S. Surf. Coat. Technol. 90 (1997) 217
7. Lakatos-Varsanyi M., and Hanzel D. Corros. Sci. 41 (1999) 1585
8. Herranen M., Wiklund U., Carlsson J.O., and Hogmark S. Surf. Coat. Technol. 99 (1998) 191
9. Soe W.H., and Yamamoto R. Mater. Chem. Phys. 50 (1997) 176
10. Nordin M., and Ericson F. Thin Solid Films 385 (2001) 174
11. An J., and Zhang Q.Y. Surf. Coat. Technol. 200 (2005) 2471
12. Ljungcrantz H., Engstrom C., Hultman L., Olsson M., Chu X., Wong M.S., and Sproul W.D. J. Vac. Sci. Technol., A, Vac. Surf. Films 16 5 (1998) 3104
13. Sanjurjo A., McKubre M.C.H., and Craig G. Surf. Coat. Technol. 39/40 (1989) 691
14. Sanjurjo A., Lau K., and Wood B. Surf. Coat. Technol. 54-55 (1992) 219
15. Perez F.J., Pedraza F., Hierro M.P., Balmain J., and Bonnet G. Surf. Coat. Technol. 153 (2002) 49
16. Perez-Mariano J., Borros S., Picas J.A., Forn A., and Colominas C. Surf. Coat. Technol. 200 (2005) 1719
17. J. Perez-Mariano, J. Elvira, F. Plana, C. Colominas, Surf. Coat. Technol. (in press).
18. J. Perez-Mariano, K.H. Lau, A. Sanjurjo, J. Caro, J.M. Prado, C. Colominas, Surf. Coat. Technol. (in press).
19. J. Perez-Mariano, K.H. Lau, A. Sanjurjo, J. Caro, D. Casellas, C. Colominas, Surf. Coat. Technol. (in press).
20. Veprek S., Veprek-Heijman G.J., Karvankova P., and Prochazka J. Thin Solid Films 476 (2005) 1
21. Huang J.H., Lau K.W., and Yu G.P. Surf. Coat. Technol. 191 (2005) 17