Fabrication of three-dimensional SiC-based ceramic micropatterns using a sequential micromolding-and-pyrolysis process

Microelectronic Engineering

Volumn 83, Issue 11-12, 2006, Pages 2475-2481

  Lim, Tae Woo ^a   Park, Sang Hu ^a   Yang, Dong Yol ^a   Pham, Tuan Anh ^b   Lee, Dong Hoon ^b   Kim, Dong Pyo ^b   Chang, Sung Il ^a   Yoon, Jun Bo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Chungnam National University   (South Korea)

Author keywords

3D Ceramic microstructures; Diffuser lithography; Micromolding; Two photon process

Indexed keywords

CERAMIC MATERIALS; LITHOGRAPHY; MOLDING; PYROLYSIS; SILICON CARBIDE; TRIBOLOGY;

3D CERAMIC MICROSTRUCTURES; DIFFUSER LITHOGRAPHY PROCESS (DLP); MICROMOLDING; TWO PHOTON POLYMERIZATION (TPP);

MICROSTRUCTURE;

EID: 33751245302     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.05.010     Document Type: Article

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