Wireless strain sensing microsystem

Emerging Information Technology Conference 2005

Volumn 2005, Issue , 2005, Pages 20-23

  Young, Darrin J ^a   Ko, Wen H ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED OPTOELECTRONICS; SENSITIVITY ANALYSIS; SIGNAL PROCESSING; STRAIN MEASUREMENT; SYNCHRONOUS MACHINERY; VOLTAGE MEASUREMENT; WIRELESS TELECOMMUNICATION SYSTEMS;

AMPLITUDE SHIFT KEYING; INTEGRATED SENSING ELECTRONICS; OUTPUT VOLTAGE; STRAIN SENSING MICROSYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 33751167618     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EITC.2005.1544332     Document Type: Conference Paper

References (17)

1. M. L. Nagy, C. Apanius, and J. W. Siekkinen, "A User Friendly, High-Sensitivity Strain Gauge," Sensors, Vol. 18, pp. 20 - 27, June 2001.
2. M. Hrovat, D. Belavic, Z. Samardzija, and J. Holc, "An investigation of thick-film resistor, fired at different temperatures, for strain sensors," International Spring Seminar on Electronics Technology, pp.32-36, May 2001.
3. K. E. Wojciechowski, B. E. Boser, and A. P. Pisano, "A MEMS resonant strain sensor operated in air," The Seventeenth Annual International Conference on Micro Electro Mechanical Systems (IEEE-MEMS), 2004, pp. 841-845.
4. J. Guo, H. I. Kuo, D. J. Young, and W. H. Ko, "Buckled beam linear output capacitive strain sensor", Solid State Sensor, Actuator and Microsystems Workshop, 2004.
5. L. Que, M.-H. Li, L. L. Chu, and Y. B. Gianchandani, "Measurements of material properties using differential capacitive strain sensors," Journal of Microelectromechanical Systems, Vol. 11, pp. 489-498, October 2002.
6. W. H. Ko, J. Hynecek, and J. Homa, "Single Frequency RF Powered ECG Telemetry System," IEEE Transactions on Biomedical Engineering, Vol. BME-26, No. 2, February 1979, pp. 105-109.
7. J. A. Von Arx, and K. Najafi, "A wireless single-chip telemetry powered neural stimulation system," IEEE Int. Solid State Circuits Conf. (ISSCC)Dig. Tech. Papers, 1999, pp. 214-215.
8. W. Liu and M. S. Humayun, "Retinal Prosthesis," IEEE Int. Solid State Circuits Conf. (ISSCC) Dig. Tech. Papers, 2004, pp. 218-219.
9. M. Lemkin and B. E. Boser, "A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics," IEEE Journal of Solid-State Circuits, Vol. 34, pp. 456-468, April 1999.
10. C. Junseok, H. Kulah, and K. Najafi, "An in-plane high-sensitivity, low-noise micro-g silicon accelerometer," The Sixteenth Annual International Conference on Micro Electro Mechanical Systems (IEEE-MEMS), 2003, pp. 466-469.
11. N. Yazdi and K. Najafi, "An interface IC for a capacitive silicon μg accelerometer," IEEE Int. Solid State Circuits Conf. (ISSCC) Dig. Tech. Papers, 1999, pp. 132-133.
12. M. Tavakoli and R. Sarpeshkar, "An offset-cancelling low-noise lock-in architecture for capacitive sensing," IEEE Journal of Solid-State Circuits, Vol. 38, pp. 244-253, Feb. 2003.
13. J. Wu, G. K. Fedder, and R. Carley, "A low-noise low-offset chopper-stabilized capacitive-readout amplifier for CMOS MEMS accelerometers," IEEE Int. Solid State Circuits Conf. (ISSCC) Dig. Tech. Papers, 2002, pp. 428-429.
14. M. Suster, J. Guo, N. Chaimanonart, W. H. Ko, and D. J. Young, "High Performance Stain Sensing Microsystem," IEEE Custom Integrated Circuits Conference, pp. 693-696, October 2004.
15. W. H. Ko, S. P. Liang, and C. D. F. Fung, "Design of Radio-Frequency Powered Coils for Implant Instruments," Med. Biol. Eng. & Comput., Vol. 15, pp. 634-640, 1977.
16. N. Chaimanonart, W. H. Ko, and D. J. Young, "Remote RF Powering System for MEMS Strain Sensors," Technical Digest of The Third IEEE International Conference on Sensors, pp. 1522-1525, October 2004
17. N. Chaimanonart, M. Suster, W. H. Ko, and D. J. Young, "Two-Channel Data Telemetry with Remote RF Powering for High-Performance Wireless MEMS Strain Sensing Applications," IEEE Sensors Conference, October 2005.