AeroMEMS sensor array for high-resolution wall pressure measurements

Sensors and Actuators, A: Physical

Volumn 132, Issue 1 SPEC. ISS., 2006, Pages 104-111

  Berns, A ^a   Buder, U ^a   Obermeier, E ^a   Wolter, A ^b   Leder, A ^b  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b UNIVERSITY OF ROSTOCK   (Germany)

Author keywords

AeroMEMS; Fluid mechanics; Pressure sensor; Wall pressure

Indexed keywords

COMPUTER SIMULATION; ETCHING; FLUID MECHANICS; PRESSURE MEASUREMENT; SENSORS; SILICON ON INSULATOR TECHNOLOGY; TURBULENT FLOW;

PRESSURE FLUCTUATIONS; PRESSURE SENSOR; PRESSURE SENSOR ARRAY; SILICON ETCHING; WALL PRESSURE;

MICROELECTROMECHANICAL DEVICES;

EID: 33751121012     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.04.056     Document Type: Article

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