MEMS pressure sensors for aerospace applications

IEEE Aerospace Conference Proceedings

Volumn 1, Issue , 1998, Pages 429-436

  Lin, Liwei ^a   Yun, Weijie ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b SiTek Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSPACE APPLICATIONS; DIAPHRAGMS; ELECTROMECHANICAL DEVICES; FABRICATION; INTEGRATED CIRCUITS; MEMS; MICROELECTRONICS; PRESSURE SENSORS; SURFACE MICROMACHINING; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC TRANSDUCERS; SENSORS; SILICON WAFERS;

FABRICATION PROCESS; FULLY COMPATIBLE; LINEARITY ERRORS; MEMS (MICROELECTROMECHANICAL SYSTEMS); MEMS PRESSURE SENSOR; MICRO-MACHINED; PIEZORESISTIVE SENSING; THIN DIAPHRAGMS;

AEROSPACE ENGINEERING; PRESSURE TRANSDUCERS;

PIEZORESISTIVE SENSING; PRESSURE SENSORS;

EID: 0031627701     PISSN: 1095323X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/AERO.1998.686941     Document Type: Conference Paper

References (21)

1. S.J. Presser, "Advances in Sensors for Aerospace Applications, " Sensors and Actuators, Vol. A37-38, 128-134, 1993.
2. K.E. Peterson, "Silicon as a Mechanical Material, " Proceedings of the IEEE, Vol. 70, No. 5, 420-457, 1982.
3. O.N. Tufte, P.W. Chapman and D. Long, "Silicon Diffused-elementPiezoresistive Diaphragm, " J. Appi. Phys., pp. 3322, 1962.
4. S.K. Clark and K.D. Wise, "Pressure Sensitivity in Anisotropically Etched Thin-Diaphragm Pressure Sensors, " IEEE Trans. Electron Devices, Vol. ED-26, 1887-1896, 1979.
5. W.H. Ko, "Solid-State Capacitive Pressure Transducers, " Sensors and Actuators, Vol. 10, 303320, 1986.
6. H.L. Char and K.D. Wise, "Scaling Limits in Batch-Fabricated Silicon Pressure Sensors, " IEEE Trans. Electron Devices, Vol. ED-34, 850-858, 1987.
7. K. Suzuki, S. Suwazono and T. Ishihara, "CMOS Integrated Silicon Pressure Sensor, " IEEE Journal of Solid-State Circuits, Vol. 22, 151-156, 1987.
8. H. Guckel and David Burns, Planar Processed Polysilicon Sealed Cavities for Pressure Transducers Array, IEDM, .223-225, 1984.
9. S. Sugiyama, K. Shimaoka and O. Tabata, "Surface Micromachined Micro-Diaphragm Pressure Sensors, " Proc. Of the 6th Int. Conf. On Solid-State Sensors and Actuators, Transducers'91, 188-191, 1991.
10. Kung J.T. And H.-S. Lee, "An Integrated Air-Gap-Capacitor Pressure Sensor and Digital Readout with Sub-100 Attofarad Resolution, " Journal. Of Microelectromechanical Systems, Vol. 1, 121-129, 1992.
11. M.E. Habibi, E. Lueder, T. Kallfass and D. Horst, "A Surface Micromachined Capacitive Absolute Pressure Sensor Array on a Glass Substrate, " Sensors and Actuators, Vol. A46, 125-128, 1995.
12. CH. Masti-angelo, X. Zhang and W.C Tang, "Surface-micromachined Capacitive Differential Pressure Sensor with Lithographically Defined Silicon Diaphragm, " J. Of Microelectromechanical Systems, Vol. 5, 89-105, 1996.
13. E. Bassous, "Fabrication of Novel Three-Dimensional Microstructures by Anisotropic Etching of (100) and (110) Silicon, " IEEE Trans, on Electron Devices, Vol. ED25, 1178-1185, 1978.
14. S. Suwazono, H. Tanigawa and M. Hirata, "Diaphragm Thickness Control in Silicon Pressure Sensors Using an Anodic Oxidation Etch-Stop, " J. Of the Electrochemical Society, Vol. 134, 2037-2041 1987.
15. Liwei Lin, K.M. McNair, R.T. Howe and A.P. Pisano, "Vacuum Encapsulated Lateral Microresonators, " Proc. Of the 7th Int. Conf. On Solid-State Sensors and Actuators, Transducers'93, 270273, 1993.
16. CS. Smith, "Piezoresistive Effect in Germainium and Silicon, " Phys. Rev., Vol. 94, No.l, 42-49, 1954.
17. W.C. Chien, "Elasticity, " (in Chinese), Asia-East Book Company, Taipei Taiwan, 1991.
18. S.P. Timoshenko and S. Woinowsky-Krieger, "Theory of Plates and Shells", 2nd. Ed., McGraw-Hill, New York, 1959.
19. Liwei Lin, W. Yun, H.-Chi Chu and M. Chiao, "Surface Micromachined Diaphragm Pressure Sensors with Optimized Piezoresistive Sensing Resistors", 1995 IEEE TENCON, Hong Kong, 24-27, 1995.
20. Motorola, "Pressure Sensors-Device Data", Motorola Semiconductor Products Sector, Phonex, Arizona, 1994.
21. H.-C. Chu, "Surface Micromachined Piezoresistive Pressure Sensors", MS thesis, Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan, 1996.