Silicon thermal anemometry: Developments and applications

Measurement Science and Technology

Volumn 7, Issue 10, 1996, Pages 1360-1377

  Van Putten, Anton F P ^a   Van Putten, Michael J A M ^a   Van Putten, Maurice H P M ^a  

^a Anmar Research Laboratories   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT CONVECTION; HEAT TRANSFER; HYDRODYNAMICS; Q FACTOR MEASUREMENT; SILICON ON INSULATOR TECHNOLOGY; SILICON SENSORS; SPURIOUS SIGNAL NOISE; THERMAL VARIABLES MEASUREMENT; VOLUME MEASUREMENT;

BIASING MODELS; ELECTRICAL SIGNAL; FORCED FLOW; SILICON THERMAL ANEMOMETRY; THERMAL FLOW SENSORS; THERMAL HYDRODYNAMIC BOUNDARY LAYER;

ANEMOMETERS;

ANEMOMETERS; FLOW MEASUREMENT;

EID: 0030268195     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/7/10/007     Document Type: Article

References (34)

1. Melnik and Weske J R 1967 Advances in hot-wire anemometry Proc. Int. Symp. on Hot-wire Anemometers (HAW), University of Maryland, College Park, 20-21 March
2. van Putten A F P and Middelhoek S 1974 Integrated silicon anemometer Electron. Lett. 10 425-6
3. van Putten A F P and Middelhoek S 1976 Integrated silicon anemometer, USA patent 3 996 799
4. van Putten A F P and Middelhoek S 1988 Integrated silicon anemometers PhD Thesis Katholieke Universiteit Leuven
5. Pitts and Sisson L E 1977 Heat Transfer (New York: McGraw-Hill)
6. Eckert E 1966 Einführung in den Wärme- und Stoffaustausch 3rd edn (Berlin: Springer)
7. Hinze J O 1959 Turbulence, Anemometry. Introduction to its Mechanisms and Theory (New York: McGraw-Hill)
8. Schlichting H 1979 Boundary Layer Theory (New York: McGraw-Hill)
9. Chapman AD 1984 Heat Transfer (New York: McMillan)
10. McGroskey and Durbin E J 1972 Flow angle shear stress measurements using heated films and wires J. Basic Eng. Trans. ASME 94 46-52
11. van Riet J H and Huijsing J H 1976 Integrated direction-sensitive flowmeter Electron. Lett. 12 647-8
12. Huijsing J H, Schuddemat J P and Verhoef W 1982 Monolithic integrated direction-sensitive flow sensor IEEE Trans. Electron Devices 29 133-6
13. van Oudheusden B 1989 Integrated silicon flow sensors PhD Thesis Delft University of Technology
14. van Dijk R 1995 The Development of a Thermal Flow Sensor for the Measurement of Respiratory Flow (Eindhoven: Eindhoven University of Technology)
15. van Putten AFP 1996 Electronic Measurement Systems (Bristol: IOP) ch 6
16. Bouwstra S 1990 Resonating microbridge mass flow sensor PhD Thesis Twente University of Technology, The Netherlands
17. Yuhua Ma, Shuangyu Ma, Tieliu Wang and Weiling Fang 1995 Air-flow sensor and humidity sensor application to neonatal infant respiration monitoring Sensors Actuators A 49 47-50
18. Gajda M A and Ahmed H 1995 Applications of thermal silicon sensors on membranes Sensors Actuators A 49 1-9
19. van Putten AFP 1990 Thermal feedback drives sensor bridge simultaneously with constant supply voltage and current IEEE Trans. Instrum. Meas. 39 48-51
20. Middelhoek S and van der Spiegel J 1987 State of the Art of Sensor Research and Development, Sensors and Actuators (Amsterdam: Elsevier) pp 321-46
21. van Putten AFP 1985 Ambient temperature compensated double bridge anemometer, USA patent 4548077
22. van Putten A F P 1987 Device for measuring the flow velocity of a medium. European patent 0119 327
23. van Putten M H P M, van Putten M J A M, van Putten A F P and van Putten P F A M 1995 Method for drift elimination in sensors, USA patent 5426969
24. Moser D, Lenggenhager R, Wachutka G and Baltes H 1992 Fabrication and modeling of CMOS microbridge gas-flow sensors Sensors Actuators B 6 165-9
25. Fukang Jiang and Yu-Chong Tai 1994 Theoretical and Experimental Studies of Micromachined Hot-wire Anemometers (IEEE, IEDM) pp 139-42
26. Xing Y Z, Kordic S and Middelhoek S 1984 A new approach to offset reduction in sensors: the sensitivity variation method J. Phys. E: Sci. Instrum. 17 657-63
27. Kordic D, Zieren V and Middelhoek S 1983 A novel method for reducing the offset of magnetic field sensors Sensors Actuators 4 55-61
28. van Putten M J A M, van Putten MHPM and van Putten AFP 1994 Full additive drift elimination in vector sensors using the alternating direction method (ADM) Sensors Actuators A 44 13-17
29. Miller M R, Dickinson S A and Hitchings D J 1992 The accuracy of portable peak flow meters Thorax 47 904-9
30. Cooper W D and Helfrick AD 1970 Electronic Instrumentation and Measurement Technique (Englewood Cliffs, NJ: Prentice Hall) pp 149-51
31. van Putten M H P M, van Putten M J A M, van Putten A F P and van Putten PFAM 1994 Method for drift elimination in sensors, European patent application 94202293.0
32. Nakamura T and Maenaka K 1990 Integrated magnetic sensors Sensors Actuators A 21-23 762-9
33. Middelhoek S 1994 Quo vadis silicon sensors? Sensors Actuators A 41-42 1-8
34. Mullins M, van Putten A F P, Bayford R and Butcher J B 1995 Potential for a smart sensor based on an integrated silicon anemometer Sensors Actuators A 46-47 342-8