Anisotropic etching of silicon crystals in KOH solution: Part III Experimental and theoretical shapes for 3D structures micro-machined in (hk0) plates

Journal of Materials Science

Volumn 33, Issue 1, 1998, Pages 117-131

  Tellier, C R ^a  

^a Centre National de la Recherche Scientifique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ETCHING; MATHEMATICAL MODELS; POTASSIUM COMPOUNDS; SINGLE CRYSTALS; SOLUTIONS; TENSORS;

ANISOTROPIC ETCHING; CHEMICAL ETCHING; SILICON CRYSTALS;

SILICON;

EID: 0031673179     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1004301931004     Document Type: Article

References (43)

1. P. L. CHEN, R. S. MULLER, R. D. JOLLY, G. L. HALAC, R. M. WHITE, A. P. ANDREWS, T. C. LIM and M. E. MOTOMEDI, IEEE Trans. Electron Devices 29 (1982) 27.
2. K. E. PETERSEN, A. SHARTEL and N. F. RALEY, ibid. 29 (1982) 23.
3. G. S. SANDER, J. W. KNUTTI and J. D. MEINDL, ibid. 27 (1980) 927.
4. H. SEIDEL and L. CSERPREGI, Sensors and Actuators (1983) 455.
5. R. FRANK, Sensors and Actuators A 28 (1991) 93.
6. M. BAO, L. YU and Y. WANG, ibid. 28 (1991) 105.
7. L. D. CLAYTON, E. P. EERNISSE, R. W. WARD and R. B. WIGGINS, Sensors and Actuators, 20 (1989) 171.
8. J. S. DANEL, F. MICHEL and G. DELAPIERRE, ibid. A21-A23 (1990) 971.
9. K. E. PETERSEN, Proc. IEEE 70 (1982) 420.
10. K. SANGWAL, "Etching of crystals" (North-Holland, Amsterdam, 1987).
11. H. SEIDEL, L. CSEPREGI, A. HEUBERGER and H. BAUMGARTEL, J. Electrochem. Soc. 137 (1990) 3613.
12. C. R. TELLIER and S. DURAND, in Proceedings of the 9th European Frequency and Time Forum, Besançon, France, March 1995 (Imprimerie du Conseil Général du Doubs, 1995) pp. 426-489.
13. H. L. OFFEREINS, K. KUHL and H. SANDMAIER, Sensors and Actuators A 25-27 (1991) 9.
14. B. PUERS and W. SANSEN, ibid. 21-23 (1990) 1036.
15. Y. KANDA, ibid. 28 (1991) 83.
16. S. DURAND and C. R. TELLIER, J. Phys. III 6 (1996) 237.
17. Y. KANDA and A. YASUKAWA, Sensors and Actuators 2 (1982) 283.
18. Y. KANDA, IEEE Trans. Electron Devices ED-29 (1982) 64.
19. S. DURAND and C. R. TELLIER, J. Phys. III 6 (1996) 237.
20. T. G. LEBLOIS, C. R. TELLIER and R. BOURQUIN, Rev. Phys. Appl. 24 (1989) 877.
21. P. VIGOUREUX and C. F. BOOTH, " Quartz vibrators and their applications," (HMSO, London, 1950).
22. R. J. JACCODINE, J. Appl. Phys. 33 (1962) 2643.
23. D. F. WEIRAUCH, ibid. 46 (1975) 1478.
24. D. W. SHAW, J. Crystal Growth 47 (1979) 509.
25. R. A. BUSER and N. F. DE ROOIJ, Sensors and Actuators A 28 (1991) 71.
26. C. R. TELLIER and T. G. LEBLOIS, in Proceedings of the IEEE Frequency Control Symposium, Salt Lake City, USA, June 1993 (IEEE, New York, 1993) pp. 397-406.
27. C. R. TELLIER and D. BENMESSAOUDA, in Proceedings of the 8th European Frequency and Time Forum, Munich, Germany, March 1994 (VDI Projekt, Düsseldorf, 1994) pp. 245-255.
28. C. R. TELLIER, J. Crystal Growth 96 (1989) 450.
29. C. R. TELLIER and J. L. VATERKOWSKI, J. Mater. Sci. 24 (1989) 1077.
30. C. R. TELLIER, J. Y. AMAUDRUT and A. BRAHIM-BOUNAB, ibid 26 (1991) 5585.
31. C. R. TELLIER and A. BRAHIM- BOUNAB, ibid. 29 (1994) 5953.
32. Idem., ibid. 29 6354.
33. E. BASSOUS and E. F. BARAN, J. Electrochem. Soc. 125 (1978) 1321.
34. K. E. BEAN, IEEE Trans. Electron Devices ED-25 (1978) 1185.
35. L. CSEPREGI, Microelect. Engng. 3 (1985) 221.
36. A. BRAHIM- BOUNAB and C. R. TELLIER, in Proceedings of 6th European Frequency and Time Forum, Noordwick, The Netherlands, March 1992 (European Space Agency, Paris, 1992) pp. 349-354.
37. R. B. HEIMANN, in Silicon chemical etching, edited by J. Grabmaier (Springer, Berlin, 1982) pp. 197-224.
38. B. A. IRVING, in "The electrochemistry of semiconductors," edited by P. J. Holmes (Academic Press, London, 1962) p. 256.
39. X. P. WU and W. H. KO, Sensors and Actuators 18 (1989) 207.
40. S. DURAND, PhD thesis, Université de Franche Comté, Besançon, France (1995).
41. T. G. LEBLOIS and C. R. TELLIER, J. Phys. III 2 (1992) 1259.
42. C. R. TELLIER, A. BRAHIM- BOUNAB and J. Y . AMAUDRUT, J. Mater. Sci. 26 (1991) 5594.
43. G. K. MAYER, H. L. OFFEREINS, H. SANDMAIER and K. KUHL, J. Electrochem. Soc. 137 (1990) 3947.