High frequency characteristics of FeCoN thin films fabricated by sputtering at various (Ar+N2) gas flow rates

Journal of Applied Physics

Volumn 100, Issue 9, 2006, Pages

  Liu, Yan ^a   Liu, Z W ^a   Tan, C Y ^a   Ong, C K ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COERCIVE FORCE; IRON COMPOUNDS; MAGNETIC PROPERTIES; MAGNETIZATION; MAGNETRON SPUTTERING; MICROSTRUCTURE;

GAS FLOW RATES; HIGH FREQUENCY PROPERTIES; NITROGEN CONTENTS;

MAGNETIC THIN FILMS;

EID: 33751072341     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2361160     Document Type: Article

References (23)

1. H. Jiang, Y. J. Chen, and G. D. Lian, IEEE Trans. Magn. 0018-9464 39, 3559 (2003).
2. P. C. Kuo, S. S. Chang, C. M. Kuo, Y. D. Yao, and H. L. Huang, J. Appl. Phys. 0021-8979 10.1063/1.367930 83, 6643 (1998).
3. N. X. Sun and S. X. Wang, IEEE Trans. Magn. 0018-9464 10.1109/20.908488 36, 2506 (2000).
4. N. X. Sun and S. X. Wang, J. Appl. Phys. 0021-8979 10.1063/1.1491017 92, 1477 (2002).
5. N. X. Sun, Q. F. Xiao, and B. York, J. Appl. Phys. 0021-8979 10.1063/1.1853102 97, 10F906 (2005).
6. H. Y. Wang and E. Y. Jiang, Appl. Phys. Mater. Sci. Process. 65, 203 (1997).
7. K. Seemann, H. Leiste, and V. Bekker, J. Magn. Magn. Mater. 283, 310 (2004).
8. Z. W. Li, L. Chen, Y. Wu, and C. K. Ong, J. Appl. Phys. 0021-8979 10.1063/1.1757660 96, 534 (2004).
9. S. X. Wang, N. X. Sun, M. Yamaguchi, and S. Yabukami, Nature 0028-0836 10.1038/35025142 407, 150 (2000).
10. S. R. Kappaganthu and Y. Sun, Surf. Coating Tech. 167, 165 (2003).
11. Y. F. Chen, E. Y. Jiang, Z. Q. Li, W. B. Mi, P. Wu, and H. L. Bai, J. Phys. D 0022-3727 10.1088/0022-3727/37/10/003 37, 1429 (2004).
12. Y. Liu, L. F. Chen, C. Y. Tan, H. J. Liu, and C. K. Ong, Rev. Sci. Instrum. 0034-6748 10.1063/1.1935429 76, 063911 (2005).
13. Z. W. Liu, Y. Liu, L. Yan, C. Y. Tan, and C. K. Ong, J. Appl. Phys. 0021-8979 10.1063/1.2170588 99, 043903 (2006).
14. B. Viala, M. K. Minor, and J. A. Barnard, J. Appl. Phys. 0021-8979 10.1063/1.363352 80, 3941 (1996).
15. D. M. Borsa, Ph.D. thesis, University of Groningen, 2004.
16. Y. Sugita, H. Takahashi, M. Komuro, K. Mitsuoka, and A. Sakuma, J. Appl. Phys. 0021-8979 10.1063/1.358157 76, 6637 (1994).
17. G. Herzer, IEEE Trans. Magn. 0018-9464 10.1109/20.104389 26, 1397 (1990).
18. P. Zou, W. Yu, and J. A. Bain, IEEE Trans. Magn. 0018-9464 10.1109/TMAG.2002.802705 38, 3501 (2002).
19. V. Bekker, K. Seemann, and H. Leiste, J. Magn. Magn. Mater. 0304-8853 10.1016/j.jmmm.2005.01.025 296, 37 (2006).
20. T. L. Gilbert, IEEE Trans. Magn. 0018-9464 10.1109/TMAG.2004.836740 40, 3443 (2004).
21. H. Hoffmann, IEEE Trans. Magn. 0018-9464 10.1109/TMAG.1968.1066186 4, 32 (1968).
22. H. Hoffmann, Thin Solid Films 0040-6090 10.1016/0040-6090(79)90241-4 58, 223 (1979).
23. E. C. Stoner and E. P. Wohlfarth, IEEE Trans. Magn. 0018-9464 10.1109/TMAG.1991.1183750 27, 3475 (1991).