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Volumn 167, Issue 2-3, 2003, Pages 165-169
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Effect of nitrogen partial pressure and temperature on RF sputtered Fe-N films
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Author keywords
Fe N film; Nitrides; Phase composition; RF magnetron sputtering
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
EPITAXIAL GROWTH;
MAGNETIC RECORDING;
MAGNETIZATION;
MICROSTRUCTURE;
PARTIAL PRESSURE;
PHASE COMPOSITION;
POLYCRYSTALLINE MATERIALS;
SCANNING ELECTRON MICROSCOPY;
SPUTTERING;
THIN FILMS;
X RAY DIFFRACTION ANALYSIS;
MAGNETIC RECORDING MEDIA;
COATINGS;
COATING;
IRON;
MAGNETIC PROPERTY;
NITRIDE;
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EID: 0037461177
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(02)00910-6 Document Type: Article |
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Times cited : (16)
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References (11)
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