Structure-properties correlations for barium titanate thin films obtained by rf-sputtering

Journal of the European Ceramic Society

Volumn 27, Issue 2-3, 2007, Pages 1129-1135

  Ianculescu, Adelina ^a   Despax, Bernard ^b   Bley, Vincent ^b   Lebey, Thierry ^b   Gavrilǎ, Raluca ^c   Drǎgan, Nicolae ^d  

^a UNIVERSITY POLITEHNICA OF BUCHAREST   (Romania)

^b UNIVERSITÉ PAUL SABATIER   (France)

^c NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^d INSTITUTE OF PHYSICAL CHEMISTRY   (Romania)

Author keywords

BaTiO3; Dielectric properties; Films; Grain size; X ray methods

Indexed keywords

BARIUM TITANATE THIN FILMS; DEPOSITION-ANNEALING TECHNIQUE; POLYCRYSTALLINE FILMS; STRUCTURAL CHARACTERISTICS;

ANNEALING; BARIUM TITANATE; DIELECTRIC PROPERTIES; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; SURFACE TOPOGRAPHY; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

CERAMIC MATERIALS;

ANNEALING; BARIUM TITANATE; CERAMIC MATERIALS; DIELECTRIC PROPERTIES; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; SURFACE TOPOGRAPHY; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

EID: 33751067779     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2006.05.043     Document Type: Article

References (15)

1. Scott J.F. Device physics of ferroelectric thin-film memories. Jpn. J. Appl. Phys. 38 (1999) 2272-2274
2. Ramesh R., Aggarwal S., and Auciello O. Science and technology of ferroelectric films and heterostructures for non-volatile ferroelectric memories. Mater. Sci. Eng. 32 (2001) 191-236
3. 3 thin films using a liquid electrolyte. J. Appl. Phys. 55 (1984) 3706-3714
4. 3 thin films prepared by rf sputtering for dynamic random access memory application. Jpn. J. Appl. Phys. 33 (1994) 5187-5191
5. 3 thin films. Appl. Phys. Lett. 73 (1998) 2248-2250
6. Shaw T.M., Suo Z., Huang M., Liniger E., Laibowitz R.B., and Baniecki J.D. The effect of stress on the dielectric properties of barium strontium titanate thin films. Appl. Phys. Lett. 75 (1999) 2129-2131
7. Sharma B.H., Sarma H.N.K., and Mansingh A. Fatigue in sol-gel derived barium titanate films. J. Appl. Phys. 85 (1999) 341-346
8. 3 thin films. Thin Solid Films 389 (2001) 43-50
9. 3 multilayers for microwave application: growth and properties. J. Appl. Phys. 84 (1998) 3134-3140
10. 3 thin films prepared by the sol-gel method. J. Appl. Phys. 33 (1994) 5277-5280
11. 3 thin films rf-sputter deposited on silicon. J. Appl. Phys. 53 (1982) 8988-8992
12. Norton M.G., Cracknell K.P.B., and Carter B. Pulsed-laser deposition of barium titanate thin films. J. Am. Ceram. Soc. 75 (1992) 1999-2002
13. Lines M.E., and Glass A.M. Principles and Applications of Ferroelectric and Related Materials (1977), Clarendon, Oxford pp. 133-139
14. 3+z thin films for voltage tunable devices. Appl. Phys. Lett. 76 (2000) 625-627
15. 3 phase shifting materials. Ferroelectrics 153 (1994) 359-364