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Volumn 389, Issue 1-2, 2001, Pages 43-50
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Structural characteristics of RF-sputtered BaTiO3 thin films
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Author keywords
Infrared spectroscopy; Raman scattering; Sputtering
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Indexed keywords
ANNEALING;
BARIUM TITANATE;
CERAMIC MATERIALS;
COMPOSITION EFFECTS;
HOT PRESSING;
INFRARED SPECTROSCOPY;
MAGNETRON SPUTTERING;
POLYCRYSTALLINE MATERIALS;
RAMAN SPECTROSCOPY;
SPUTTER DEPOSITION;
THIN FILMS;
X RAY DIFFRACTION ANALYSIS;
RADIO FREQUENCY MAGNETRON SPUTTERING;
OPTICAL FILMS;
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EID: 0035876349
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(01)00885-9 Document Type: Article |
Times cited : (30)
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References (27)
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