Structural and mechanical properties of ZrN films prepared by ion beam sputtering with varying N2/Ar ratio and substrate temperature

Vacuum

Volumn 81, Issue 4, 2006, Pages 550-555

  Larijani, M M ^a   Tabrizi, N ^a,b   Norouzian, Sh ^a   Jafari, A ^b   Lahouti, S ^a   Haj Hosseini, H ^c   Afshari, N ^a  

^a ATOMIC ENERGY ORGANIZATION OF IRAN   (Iran)

^b SHAHID BAHONAR UNIVERSITY OF KERMAN   (Iran)

^c ISLAMIC AZAD UNIVERSITY   (Iran)

Author keywords

Hardness; Ion beam sputtering; Stoichiometry; ZrN

Indexed keywords

HARDNESS; ION BEAMS; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SPUTTERING; STAINLESS STEEL; STOICHIOMETRY; X RAY DIFFRACTION; ZIRCONIUM COMPOUNDS;

CRYSTALLINE PLANE INTENSITY; ION BEAM SPUTTERING; MICROSCOPIC PROPERTIES; NITROGEN RATIO;

THIN FILMS;

EID: 33751003827     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.07.018     Document Type: Article

References (15)

1. Berrios-Ortiz J.A., La Barbera-Sosa J.G., Teer D.G., and Puchi-Cabrera E.S. Surf Coat Technol 179 (2004) 145
2. Garcia J.A., Guette A., Medrano A., Labrugere C., Rio M., Lahays M., et al. Vacuum 64 (2002) 343
3. Rodriguez R.J., Garcia J.A., Medrano A., Rico M., Sanchez R., Martinez R., et al. Vacuum 67 (2002) 595
4. Huang J.-H., Hsu C.-Y., Chen S.-S., and Yu G.-P. Mater Chem Phys 77 (2002) 14
5. Chou W.J., Yu G.P., and Huang J.H. Thin Solid Films 405 (2002) 162
6. Mae T., Nose M., Zhou M., Nagae T., and Shimamura K. Surf Coat Technol 142-144 (2001) 954
7. Ensinger W., Volz K., and Kiuchi M. Surf Coat Technol 128-129 (2000) 81
8. Jonsson B., and Hogmark S. Thin Solid Films 114 (1984) 257
9. Anthony T., Fahrenbruch A., and Bube R. J Vac Sci Technol A 2 (1984) 1296
10. Hu L., Li D., and Fang G. Appl Surf Sci 220 (2003) 367
11. Wu D., Zhang Z., Fu W., Fan X., and Guo H. Appl Phys A 64 (1997) 593
12. Sundgren J.-E. Thin Solid Films 128 (1985) 21
13. Chou W., Yu Ge., and Huang J. Surf Coat Technol 149 (2002) 7
14. Toth L.E. Transition metal carbides and nitrides (1971), Academic Press, New York
15. Chen C.T., Song Y.C., Yu G.-P., and Huang J.-H. J Mater Eng Perform 7 (1998) 324