Ion beam-assisted deposition of nitrides of the 4th group of transition metals

Surface and Coatings Technology

Volumn 128-129, Issue , 2000, Pages 81-84

  Ensinger, W ^a   Volz, K ^a   Kiuchi, M ^b  

^a PHILIPPS UNIVERSITY MARBURG   (Germany)

^b OSAKA NATIONAL RESEARCH INSTITUTE   (Japan)

Author keywords

Hafnium nitride; Ion beam assisted deposition; Titanium nitride; Zirconium nitride

Indexed keywords

CRYSTAL ORIENTATION; DEPOSITION; ELECTRON BEAMS; EVAPORATION; HAFNIUM COMPOUNDS; ION BEAMS; TITANIUM NITRIDE; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIUM COMPOUNDS;

HAFNIUM NITRIDE; ZIRCONIUM NITRIDE;

ION BOMBARDMENT;

DEPOSITION; TITANIUM NITRIDE; TRANSITION METAL;

EID: 0013424338     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00662-9     Document Type: Conference Paper

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