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Applied Physics A: Materials Science and Processing

Volumn 86, Issue 1, 2007, Pages 107-114

Deep drilling on a silicon plate with a femtosecond laser: Experiment and model analysis

(3) Matsumura, T a Nakatani, T b Yagi, T a

a Suruga Seiki Corp (Japan)

b TOKAI UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATTENUATION; DRILLING; LASER ABLATION; LASERS; MATHEMATICAL MODELS; PHASE TRANSITIONS;

FEMTOSECOND LASER PULSES; LASER FLUENCE; LASER PULSE ATTENUATION; SILICON SUBSTRATES;

SILICON COMPOUNDS;

EID: 33750990757 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-006-3743-5 Document Type: Article

Times cited : (28)

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