XPS and ion scattering studies on compound formation and interfacial mixing in TiN/Ti nanolayers on plasma nitrided tool steel

Surface and Coatings Technology

Volumn 201, Issue 6, 2006, Pages 3066-3073

  Kieckow, Flávio ^a   Kwietniewski, C ^b   Tentardini, Eduardo K ^b   Reguly, Afonso ^a   Baumvol, Israel J R ^a,b  

^a FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

^b UNIVERSITY OF CAXIAS DO SUL   (Brazil)

Author keywords

Adhesion; Plasma nitriding; PVD TiN; X ray photoelectron spectroscopy

Indexed keywords

ADHESION; CHEMICAL ANALYSIS; CHEMICAL BONDS; DIFFUSION IN GASES; HARDENING; MIXING; PHYSICAL VAPOR DEPOSITION; PRECIPITATION (CHEMICAL); TOOL STEEL; X RAY PHOTOELECTRON SPECTROSCOPY;

COMPOUND FORMATION; INTERFACIAL MIXING; ION SCATTERING; PLASMA NITRIDING;

NITRIDING;

ADHESION; CHEMICAL ANALYSIS; CHEMICAL BONDS; DIFFUSION IN GASES; HARDENING; MIXING; NITRIDING; PHYSICAL VAPOR DEPOSITION; PRECIPITATION (CHEMICAL); TOOL STEEL; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 33750985064     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.06.020     Document Type: Article

References (47)

1. Jaeger G., Endler I., Bartsch K., Heilmaier M., and Leonhardt A. Surf. Coat. Technol. 150 (2002) 282
2. Podgornik B. Surf. Coat. Technol. 146-147 (2001) 318
3. Kessler O.H., Hoffmann F.T., and Mayr P. Surf. Coat. Technol. 108-109 (1998) 211
4. Höck K., Leonhardt G., Bücken B., Spies H.-J., and Larisch B. Surf. Coat. Technol. 74-75 (1995) 339
5. Höck K., Spies H.-J., Larisch B., Leonhardt G., and Bücken B. Surf. Coat. Technol. 88 (1996) 44
6. Rie K.-T. Surf. Coat. Technol. 112 (1999) 56
7. Dingremont N., Bergmann E., and Collignon P. Surf. Coat. Technol. 72 (1995) 157
8. Kwietniewski C., Fontana W., Moraes C., Rocha A.d.S., Hirsch T., and Reguly A. Surf. Coat. Technol. 179 (2004) 27
9. Navinsek B., Panjan P., and Gorenjak F. Surf. Coat. Technol. 137 (2001) 255
10. Nickel J., Shuaib A.N., Yilbas B.S., and Nizam S.M. Wear 239 (2000) 155
11. Michalski J., Lunarska E., Wierzchon T., and AlGhanem S. Surf. Coat. Technol. 72 (1995) 189
12. Pan W.-L., Yu G.-P., and Huang J.-H. Surf. Coat. Technol. 110 (1998) 111
13. Abisset S., Maury F., Feurer R., Ducarroir M., Nadal M., and Andrieux M. Thin Solid Films 315 (1998) 179
14. Gusev E.P., Lu H.C., Gustafsson T., and Garfunkel E. Phys. Rev., B 52 (1994) 1759
15. Pezzi R.P., Wallace R.M., Copel M., and Baumvol I.J.R. In: Seiler D.G. (Ed). Characterization and Metrology for ULSI Technology 2005 571 (2005), American Institute of Physics 571
16. Maurel B., Amsel G., and Nadai J.P. Nucl. Instrum. Methods Phys. Res. 197 (1982) 1
17. Baumvol I.J.R. Surf. Sci. Rep. 36 (1999) 1
18. Hofmann S. J. Vac. Sci. Technol., A 4 6 (Nov/Dec 1986)
19. Powell C.J., and Seah M.P. J. Vac. Sci. Technol., A 8 (1990) 735
20. Miola E.J., de Souza S.D., Nascente P.A.P., Dyonisio M.O., Olivieri C.A., and Spinelli D. Appl. Surf. Sci. 144-145 (1999) 272
21. Anderson S.L.T., and Howe R.F. J. Phys. Chem. 93 (1989) 4913
22. Alphonsa I., Chainani A., Raole P.M., Ganguli B., and John P.I. Surf. Coat. Technol. 150 (2002) 263
23. Mills P., and Sullivan J.L. J. Phys., D 16 (1983) 723
24. Hawn D.D., and DeKoven B.M. Surf. Interface Anal. 10 (1987) 63
25. Jutte R.H., Koi B.J., Somers M.A.J., and Mittemeijer E.J. Oxid. Met. 48 (1997) 87
26. Gontijo L.C., Machado R., Miola E.J., Casteletti L.C., and Nascente PA.P. Surf. Coat. Technol. 183 (2004) 10
27. Grosvenor A.P., Kobe B.A., and McIntyre N.S. Surf. Sci. 572 (2004) 217
28. Tan B.J., Klabunde K.J., and Sherwood P.M.A. Chem. Mater. 2 (1990) 186
29. McIntyre N.S., and Zetaruk D.G. Anal. Chem. 49 (1977) 1521
30. Chang K.-L., Chung S.-C., Lai S.-H., and Shih H.-C. Appl. Surf. Sci. 236 (2004) 406
31. Zhou Q.G., Bai X.D., Chen X.W., Peng D.Q., Ling Y.H., and Wang D.R. Appl. Surf. Sci. 211 (2003) 293
32. Tsujimura H., Goto T., and Ito Y. Mater. Sci. Eng., A Struct. Mater.: Prop. Microstruct. Process. 355 (2003) 315
33. Nishimura O., Yabe K., and Iwaki M. J. Electron Spectrosc. Relat. Phenom. 49 (1989) 335
34. Hong S.-P., and Kim K.-H. Surf. Coat. Technol. 122 (1999) 260
35. Wang X., Zheng W.T., Tian H.W., Yu S.S., Xu W., Meng S.H., He X.D., Han J.C., Sun C.Q., and Tay B.K. Appl. Surf. Sci. 220 (2003) 30
36. Wang X., Zheng W.T., Tian H.W., Yu S.S., and Wang L.L. J. Magn. Magn. Mater. 283 (2004) 282
37. S. Meskinis, M. Andrulevicius, V. Kopustinskas, S. Tamulevicius, Appl. Surf. Sci. (in press).
38. Sarma D.D., and Rao C.N.R. J. Electron Spectrosc. Relat. Phenom. 20 (1980) 25
39. Esaka F., Furuya K., Shimada H., Imamura M., Matsubayashi N., Sato H., Nishijima A., Kawana A., Ichimura H., and Kikuchi T. J. Vac. Sci. Technol., A 15 5 (Sep/Oct 1997)
40. de Almeida R.M.C., and Baumvol I.J.R. Surf. Sci. Rep. 43 (2003) 1
41. Robinson K.S., and Sherwood P.M.A. Surf. Interface Anal. 6 (1984) 261
42. Ernsberger C., Nickerson J., Miller A.E., and Moulder J. J. Vac. Sci. Technol., A 3 6 (Nov/Dec 1985)
43. Prieto P., and Kirby R.E. J. Vac. Sci. Technol., A 13 6 (Nov/Dec 1995)
44. Vasile M.J., Emerson A.B., and Baiocchi F.A. J. Vac. Sci. Technol., A 8 1 (Jan/Feb 1990)
45. Allen G.C., Curtis M.T., Hooper A.J., and Tucker P.M. J. Chem. Soc. Dalton Trans. 1677 (1973)
46. Hieu N.V., and Lichtman D. Appl. Surf. Sci. 20 (1984) 186
47. Ermolieff A., Girard M., Raoul C., Bertrand C., and Duc T.M. Appl. Surf. Sci. 21 (1985) 65