Effects of oxygen pressure on the microstructure of LaNiO3 conductive thin film monitored by in situ reflection high energy diffraction

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 6, 2006, Pages 1985-1991

  Zhu, Jun ^a   Zheng, Liang ^a   Wei, Xian Hua ^a   Zhang, Ying ^a   Li, Yan Rong ^a  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE FILMS; ELECTRON DIFFRACTION; ELECTRON REFLECTION; IN SITU PROCESSING; LANTHANUM COMPOUNDS; MICROSTRUCTURE; OXYGEN; PRESSURE EFFECTS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL VALENCE; IN SITU REFLECTION HIGH ENERGY DIFFRACTION; LNO THIN FILMS; OXYGEN PRESSURE;

THIN FILMS;

EID: 33750945837     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2338556     Document Type: Article

References (15)

1. J. F. Scott and C. A. Paz de Araup, Science 246, 400 (1989).
2. Y. B. Park, J. L. Ruglovsky, and H. A. Atwater, Appl. Phys. Lett. 85, 455 (2004).
3. F. Felten, G. A. Schneider, J. M. Sladana, and S. V. Kalinin, J. Appl. Phys. 96, 563 (2004).
4. C. M. Wu and T. B. Wu, Mater. Lett. 33, 97 (1997).
5. T. J. Zhu, L. Lu, and C. V. Thompson, J. Cryst. Growth 273, 172 (2004).
6. Y. Drezner and S. Berger, J. Appl. Phys. 94, 6774 (2003).
7. A. D. Li, C. Z. Ge, P. Lü, and N. B. Ming, Appl. Phys. Lett. 69, 161 (1996).
8. J. H. Neave, P. J. Dobson, B. A. Joyce, and Jing Zhang, Appl. Phys. Lett. 47, 100 (1985).
9. C. W. Snyder, D. Barlett, B. G. Orr, P. K. Bhattacharya, and J. Singh, J. Vac. Sci. Technol. B 9, 2189 (1991).
10. P. Chen, S. Y. Xu, W. Z. Zhou, and C. K. Ong, J. Appl. Phys. 85, 3000 (1999).
11. F. Hou, Y. N. Qin, T. X. Xu, and M. X. Xu, J. Electroceram. 8, 243 (2002).
12. A. J. H. M. Rijnders, G. Koster, D. H. A. Blank, and H. Rogalla, Appl. Phys. Lett. 70, 1888 (1997).
13. K. Shimoyama, K. Kubo, M. Lida, and K. Yamabe, J. Vac. Sci. Technol. A 19, 2083 (2001).
14. P. Chen, S. Y. Xu, J. Lin, C. K. Ong, and D. F. Cui, Appl. Surf. Sci. 137, 98 (1999).
15. J. P. Kemp and P. A. Cox, Solid State Commun. 75, 731 (1990).