Infrared studies of hydrogenated amorphous carbon (a-C:H) and its alloys (a-C:H, N, F)

Physical Review B - Condensed Matter and Materials Physics

Volumn 55, Issue 19, 1997, Pages 13020-13024

  Liu, S ^a   Gangopadhyay, S ^a   Sreenivas, G ^b   Ang, S ^b   Naseem, H ^b  

^a TEXAS TECH UNIVERSITY   (United States)

^b 3202 Bell Engineering Center   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037803265     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.55.13020     Document Type: Article

References (20)

1. S. W. Pang and M. W. Horn, IEEE Electron Device Lett. 11, 391 (1990).
2. T. E. Derry, R. A. Spits, and J. P. F. Sellschop, Mater. Sci. Eng. B 11, 249 (1992).
3. B. Meyerson and F. W. Smith, Solid State Commun. 34, 531 (1980).
4. D. I. Jones and A. D. Stewart, Philos. Mag. B 46, 423 (1982).
5. Y. Hamakawa, D. Kruangam, M. Deguchi, Y. Hattori, T. Toyama, and H. Okamoto, Appl. Surf. Sci. 33&34, 1276 (1988).
6. Y. Hamakawa, T. Toyama and H. Okamoto, J. Non-Cryst. Solids 115, 180 (1989).
7. S. S. Ang, G. Sreenivas, W. D. Brown, H. A. Naseem and R. K. Ulrich, J. Electron. Mater. 22, 347 (1993).
8. G. Sreenivas, S. S. Ang and W. D. Brown, J. Electron. Mater. 23, 569 (1994).
9. He-Xiang Han and Bernard J. Feldman, Solid State Commun. 65, 921 (1988).
10. Nobuki Mutsukura, Shin-ichi Inoue, and Yoshio Machi, J. Appl. Phys. 72, 43 (1992).
11. J. H. Kaufman, S. Metin and D. D. Saperstein, Phys. Rev. B 39, 13t053 (1989).
12. H. Shanks, C. J. Fang, L. Ley, M. Cardona, F. J. Demond and S. Kalbitzer, Phys. Status Solidi B 100, 43 (1980).
13. K. Mui, D. K. Basa, F. W. Smith and Reed Corderman, Phys. Rev. B 35, 8089 (1987).
14. J. Tauc, R. Grigorovici and A. Vancu, Phys. Status Solidi 15, 627 (1966).
15. J. C. Angus, P. Koidl, and Stanley Domitz, in Plasma Deposited Thin Films, edited by J. Mort and F. Jansen (CRC, Boca Raton, FL, 1986), p. 113.
16. John Robertson, Prog. Solid State Chem. 21, 199 (1991).
17. N. B. Colthup, C. H. Daly, and S. E. Wilberly, Introduction to Infrared and Raman Spectroscopy, 3rd ed. (Academic, New York, 1990).
18. H. Siebert, Anwendungen der Schwingungsspektroskopie in der Anorganischen Chemie (Springer, Berlin, 1966).
19. L. J. Bellamy, The Infra-red Spectra of Complex Molecules (Chapman and Hall, London, 1975), Vol. 1.
20. L. J. Bellamy and R. F. Branch, Nature 173, 633 (1954).