Electron and excited particle densities in a carbon ablation plume

Applied Surface Science

Volumn 197-198, Issue , 2002, Pages 257-262

  Bratescu, Maria Antoaneta ^a   Sakai, Yosuke ^a   Yamaoka, Daisuke ^a   Suda, Yoshiyuki ^a   Sugawara, Hirotake ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

Carbon ablation; Laser absorption spectroscopy; Stark broadening effect

Indexed keywords

ABSORPTION SPECTROSCOPY; CARRIER CONCENTRATION; EXCIMER LASERS; LASER BEAM EFFECTS; LIGHT ABSORPTION;

LASER ABSORPTION SPECTROSCOPY;

SURFACE CHEMISTRY;

EID: 17644436719     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00379-3     Document Type: Conference Paper

References (13)

1. Duffey T.P., McNeela T.G., Yamamoto T., Mazumder J., Schawlow A.L. Phys. Rev. B 51 1995 14652-14663.
2. Camposeo A., Cervelli F., Fuso F., Allegrini M., Arimondo E. Appl. Phys. A 69 Suppl. 1999 S509-S513.
3. Gordillo-Vazquez F.J., Perea A., Chaos J.A., Gonzalo J., Afonso C.N. Appl. Phys. Lett. 78 2001 7-9.
4. Harilal S.S., Bindhu C.V., Issac R.C., Nampoori V.P.N., Vallabhan C.P.G. J. Appl. Phys. 82 1997 2140-2146.
5. Suda Y., Nishimura T., Ono T., Akazawa M., Sakai Y., Homma N. Thin Solid Films 374 2000 287-290.
6. Y. Sakai, M.A. Bratescu, Y. Suda, M. Mizuno, in: Proceedings of the Symposium on Plasma Processing, Kyoto, 2000 Y. Sakai, M.A. Bratescu, Y. Suda, M. Mizuno, in: Proceedings of the IEEE International Conference on Plasma Science, Louisiana, 2000 Y. Sakai, M.A. Bratescu, Y. Suda, M. Mizuno, in: Proceedings of the Applied Physics Conference, Kobe, 1999.
7. Y. Sakai, M.A. Bratescu, Y. Suda, M. Mizuno, in: Proceedings of the Symposium on Plasma Processing, Kyoto, 2000 Y. Sakai, M.A. Bratescu, Y. Suda, M. Mizuno, in: Proceedings of the IEEE International Conference on Plasma Science, Louisiana, 2000 Y. Sakai, M.A. Bratescu, Y. Suda, M. Mizuno, in: Proceedings of the Applied Physics Conference, Kobe, 1999.
8. Y. Sakai, M.A. Bratescu, Y. Suda, M. Mizuno, in: Proceedings of the Symposium on Plasma Processing, Kyoto, 2000 Y. Sakai, M.A. Bratescu, Y. Suda, M. Mizuno, in: Proceedings of the IEEE International Conference on Plasma Science, Louisiana, 2000 Y. Sakai, M.A. Bratescu, Y. Suda, M. Mizuno, in: Proceedings of the Applied Physics Conference, Kobe, 1999.
9. W. Demtroder, Laser Spectroscopy, 2nd Enlarged Edition, Springer, Berlin, 1999 (Chapter 3.1.3).
10. W. Lochte-Holtgreven, Plasma Diagnostics, AIP, New York, 1995, p. 160.
11. H.R. Griem, Plasma Spectroscopy, McGraw-Hill, New York, 1964 (Tables 4 and 5).
12. NIST Atomic Spectra Database, http://physics.nist.gov/.
13. Orsitto F., Borra M., Coppotelli F., Gatti G., Neri E. Rev. Sci. Instrum. 70 1999 921.