Nanostructured two-phase nc-TiN/a-(TiB 2 , BN) nanocomposite thin films

Applied Surface Science

Volumn 253, Issue 3, 2006, Pages 1631-1638

  Lu, Y H ^a,b   Shen, Y G ^a   Li, K Y ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

Hardness; Microstructure; Nanocomposite thin films; Surface roughness; Ti B N

Indexed keywords

AMORPHOUS MATERIALS; HARDNESS; MAGNETRON SPUTTERING; MICROSTRUCTURE; SURFACE ROUGHNESS; THIN FILMS; TITANIUM NITRIDE;

AMORPHOUS MATRIX; NANOCOMPOSITE THIN FILMS; PHASE CONFIGURATION; TI-B-N;

NANOSTRUCTURED MATERIALS;

EID: 33750712361     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.02.058     Document Type: Article

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