XPS study of reactively sputtered Ti-B-N hard coatings

Surface and Interface Analysis

Volumn 29, Issue 12, 2000, Pages 823-828

  Ruby, C ^a   Ott, R ^a   Huang, F ^a   Weaver, M L ^a   Barnard, J A ^a  

^a University of Alabama   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; ELECTRON ENERGY LEVELS; HARDNESS; MAGNETRON SPUTTERING; SPECTRUM ANALYSIS; THERMODYNAMICS; THIN FILMS; TITANIUM COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

GAS MIXTURES; HARD COATINGS;

INORGANIC COATINGS;

EID: 0034513361     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/1096-9918(200012)29:12<823::AID-SIA933>3.0.CO;2-C     Document Type: Article

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