SCOPUS 정보 검색 플랫폼

Volumn 39, Issue 1, 2000, Pages 157-167

High-rate automated deposition system for the manufacture of complex multilayer coatings

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0043028812 PISSN: 1559128X EISSN: 21553165 Source Type: Journal
DOI: 10.1364/AO.39.000157 Document Type: Article

Times cited : (51)

References (8)

1
- 0041295367
- Modern computational methods for optical thin film systems
- J. A. Dobrowolski, “Modern computational methods for optical thin film systems,” Thin Solid Films34, 313-321 (1976).
- (1976) Thin Solid Films , vol.34 , pp. 313-321
- Dobrowolski, J.A.¹

2
- 77949408973
- Deposition error compensation for optical multilayer coatings. II. Experimental results—sputtering system
- B. T. Sullivan and J. A. Dobrowolski, “Deposition error compensation for optical multilayer coatings. II. Experimental results—sputtering system,” Appl. Opt. 32, 2351-2360 (1993).
- (1993) Appl. Opt , vol.32 , pp. 2351-2360
- Sullivan, B.T.¹ Dobrowolski, J.A.²

3
- 0000327506
- Implementation of a numerical needle method for thin-film design
- B. T. Sullivan and J. A. Dobrowolski, “Implementation of a numerical needle method for thin-film design,” Appl. Opt. 35, 5484-5492 (1996).
- (1996) Appl. Opt , vol.35 , pp. 5484-5492
- Sullivan, B.T.¹ Dobrowolski, J.A.²

4
- 0039945433
- A practical magnetron sputtering system for the deposition of optical multilayer coatings
- J. A. Dobrowolski, J. R. Pekelsky, R. Pelletier, M. Ranger, B. T. Sullivan, and A. J. Waldorf, “A practical magnetron sputtering system for the deposition of optical multilayer coatings,” Appl. Opt. 31, 3784-3789 (1992).
- (1992) Appl. Opt , vol.31 , pp. 3784-3789
- Dobrowolski, J.A.¹ Pekelsky, J.R.² Pelletier, R.³ Ranger, M.⁴ Sullivan, B.T.⁵ Waldorf, A.J.⁶

5
- 0000400904
- Metal/dielectric transmission interference filters with low reflectance. II. Experimental results
- B. T. Sullivan and K. L. Byrt, “Metal/dielectric transmission interference filters with low reflectance. II. Experimental results,” Appl. Opt. 34, 5684-5694 (1995).
- (1995) Appl. Opt , vol.34 , pp. 5684-5694
- Sullivan, B.T.¹ Byrt, K.L.²

6
- 85010185751
- Integrated design and manufacture of thin film multilayer filters using an automated deposition system
- B. T. Sullivan and J. A. Dobrowolski, “Integrated design and manufacture of thin film multilayer filters using an automated deposition system,” Phys. Can. 52, 213-215 (1996).
- (1996) Phys. Can , vol.52 , pp. 213-215
- Sullivan, B.T.¹ Dobrowolski, J.A.²

7
- 0032308405
- Manufacture of complex multilayer filters using an automated deposition system
- B. T. Sullivan, J. A. Dobrowolski, G. Clarke, T. Akiyama, N. Osborne, M. Ranger, L. Howe, A. Matsumoto, Y. Song, and K. Kikuchi, “Manufacture of complex multilayer filters using an automated deposition system,” Vacuum51, 647-654 (1998).
- (1998) Vacuum , vol.51 , pp. 647-654
- Sullivan, B.T.¹ Dobrowolski, J.A.² Clarke, G.³ Akiyama, T.⁴ Osborne, N.⁵ Ranger, M.⁶ Howe, L.⁷ Matsumoto, A.⁸ Song, Y.⁹ Kikuchi, K.¹⁰

8
- 0020094561
- Deposition of optical coatings:Process control and automation
- W. P. Thoeni, “Deposition of optical coatings: process control and automation,” Thin Solid Films88, 385-397 (1982).
- (1982) Thin Solid Films , vol.88 , pp. 385-397
- Thoeni, W.P.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.