Design and development of a large range linear encoder with subnanometer resolution

Review of Scientific Instruments

Volumn 77, Issue 10, 2006, Pages

  Huang, Yanan ^a   Menq, Chia Hsiang ^a  

^a The Ohio State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; FEEDBACK; MEASUREMENT THEORY; NONLINEAR CONTROL SYSTEMS; PHASE LOCKED LOOPS; TRANSDUCERS;

MEASUREMENT ACCURACY; REFERENCE GRATING; SUBNANOMETER RESOLUTION;

SIGNAL ENCODING;

EID: 33750523060     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2358694     Document Type: Conference Paper

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