Profilometry using an optical stylus with interferometric readout

Measurement Science and Technology

Volumn 8, Issue 5, 1997, Pages 546-549

  Zhang, Ji hua ^a   Cai, Lilong ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPACT DISKS; DISTANCE MEASUREMENT; FEEDBACK CONTROL; OPTICAL RESOLVING POWER; PIEZOELECTRIC TRANSDUCERS; SURFACE TESTING;

OPTICAL HEADS; OPTICAL STYLUS; PROFILOMETRY;

INTERFEROMETERS;

EID: 0031146098     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/8/5/013     Document Type: Article

References (9)