Scanning Probe Position Encoder (SPPE) - A new approach for a high precision and high speed position measurement system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4344, Issue , 2001, Pages 552-561

  Ohara, T ^a  

^a NanoWave Inc   (United States)

Author keywords

Nanotechnology; Overlay metrology; Position encoder; Position measurement; Scanning probe microscopy

Indexed keywords

BANDWIDTH; DIFFRACTION GRATINGS; HETERODYNING; HOLOGRAPHY; NATURAL FREQUENCIES;

SCANNING PROBE POSITION ENCODERS (SPPE);

NANOTECHNOLOGY;

EID: 0034761522     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.436778     Document Type: Conference Paper

References (9)

1. Progress in optical disk recording with over 20GB of capacity
2. The DataStore 2K2: A critical look at storage in the new millennium
3. Real-time subnanometer position sensing with long measurement range
4. Scanning capacitance microscopy
5. Actuation and internal friction of torsional nanomechanical silicon resonatoros
6. Hologram technology goes to work