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Thin Solid Films

Volumn 515, Issue 3, 2006, Pages 1043-1046

Reactively sputtered GaAsxN1-x thin films

(3) Yadav, Brajesh S a Major, S S a Srinivasa, R S a

a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY (India)

Author keywords

Gallium arsenide nitride; Optical properties; Sputtering; Structure; Thin film

Indexed keywords

CRYSTAL GROWTH; CRYSTAL LATTICES; LATTICE CONSTANTS; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SEMICONDUCTING GALLIUM ARSENIDE; TRANSMISSION ELECTRON MICROSCOPY;

ABSORPTION SPECTRA; GALLIUM ARSENIDE NITRIDE; SPUTTERING ATMOSPHERE; SPUTTERING GAS;

THIN FILMS;

EID: 33750487179 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2006.07.062 Document Type: Article

Times cited : (9)

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